石墨烯谐振器激励检测研究进展  

Research progress on excitation-detection methods of graphene resonators

作　　者：邢维巍[1] 孙璐 樊尚春[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院

出　　处：《电子测量与仪器学报》2018年第10期1-8,共8页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金(61773045);教育部创新团队滚动支持(IRT_16R02)资助项目

摘　　要：谐振器是谐振式传感器的核心元件,而谐振式传感器由于其优良的重复性、分辨力和稳定性,广泛被应用于航空航天事业。随着技术发展,适用于航空事业的谐振器朝着体积小、质量轻、精度高、品质因数高的方向不断发展。但由于谐振材料本身以及加工工艺的限制,传统硅谐振器发展已进入瓶颈期。石墨烯材料具有着优异的机械、电学、光学性能,使其成为新型谐振器研究的热门材料之一。而确定激励检测方法是石墨烯谐振器结构设计第一步。介绍了石墨烯谐振器现有的理论及实验研究成果,并针对现有的谐振器激励检测方法其优缺点,是否适用于石墨烯谐振器进行了分析。其次,对现有的石墨烯谐振器实验中的激励检测方法进行了综述,并对之后的研究方向进行了展望。Resonator is the core part of resonant sensor. Resonant sensor is widely used in aerospace industry because of its excellent repeatability, resolution and stability. With the development of technology, resonators which are suitable for aerospace industry are developing continuously in the trend of smaller volume, lighter weight, higher precision and higher quality factor. However, due to the limitations of material itself and processing technology, the development of traditional silicon resonators have entered a bottleneck stage. Graphene materials have excellent mechanical, electrical and optical properties, making them one of the most popular materials for new resonators. Among the researches of grapheme resonators, determining excitation-detection method is the first step in the design of graphene resonators. The existing theoretical and experimental research results of graphene resonators are introduced. Advantages and disadvantages of existing resonator excitation-detection methods are analyzed to determine whether they can be applied to graphene resonators. Moreover, existing excitation-detection methods in experiments of graphene resonator are reviewed, and future research directions are prospected. The review has guiding significance for the design of graphene resonators.

关 键 词：石墨烯 谐振器 激励检测 谐振式传感器 

分 类 号：TH703[机械工程—仪器科学与技术]