三维集成转接板互连电磁传播仿真中吸收边界条件的选取及其验证  

Absorbing boundary conditions ′ selection and validation for simulation of electromagnetic propagation in interconnects of interposers applied in three-dimensional integration

作　　者：张云霞 缪旻[1,2] 胡变香 韩波 李振松[1] Zhang Yunxia;Miao Min;Hu Bianxiang;Han Bo;Li Zhensong(Information Microsystem Institute,Beijing Information Science&Technology University,Beijing 100101,China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Peking University,Beijing 100871,China;Wireless Mobile Innovation Center,China Academy of Telecommunications Technology(CATT),Beijing 100080,China)

机构地区：[1]北京信息科技大学信息微系统研究所,北京100101 [2]北京大学微米/纳米加工技术国家级重点实验室,北京100871 [3]电信科学技术研究院有限公司无线移动创新中心,北京100080

出　　处：《电子技术应用》2019年第3期22-27,31,共7页Application of Electronic Technique

基　　金：国家自然科学基金(61674016);国家重点基础研究发展计划(973计划)(2015CB057201);北京市属高等学校高层次人才引进与培养计划项目(长城学者培养计划)(CIT&TCD20150320)

摘　　要：为了完成三维集成转接板互连结构中电磁场分布的建模与数值计算,采用时域有限差分法(Finite DifferenceTime Domain, FDTD)仿真二维横电波(Transverse Electric, TE)的传播,观察在添加Mur吸收边界条件和完全匹配层(Perfectly Matched Layer, PML)吸收边界条件时边界处磁场的变化,绘制误差曲线与等相位线来检验这两种边界条件的吸收性能。结果表明,将PML边界条件作为二维TE波的吸收边界可以确保仿真结果更符合工程实际。In order to realize the modeling and numerical simulation of the electromagnetic field distribution and wave propagation in interconnects of interposers for three-dimensional integration, the Finite Difference Time Domain(FDTD) method is used in this paper to reveal the propagation of two-dimensional TE( Transverse Electric) wave. Variations of the magnetic field at the boundary are compared when adding Mur and PML( Perfectly Matched Layer) absorbing boundary conditions respectively. The error curves and isophasal lines are plotted to validate the absorbing performance of these two boundary conditions. The results show that PML can be used as the absorbing boundary of a two-dimensional TE wave to ensure a more appropriate absorbing effect in engineering simulation.

关 键 词：三维集成 转接板 时域有限差分法 二维横电波 Mur 完全匹配层 

分 类 号：TN407[电子电信—微电子学与固体电子学]