BST铁电薄膜非制冷红外探测器热成像应用  

An Uncooled (Ba,Sr)TiO_3 Thin Film Infrared Sensor Array Suitable for Thermal Imaging Applications

作　　者：唐军[1] 程建功[1] 褚君浩[1] 郁启华 

机构地区：[1]中国科学院红外物理国家实验室 [2]上海德运光电技术有限公司,上海200083

出　　处：《红外技术》2002年第5期18-21,33,共5页Infrared Technology

基　　金：~~

摘　　要：报道了基于Ba0 .8Sr0 .2 TiO3薄膜的红外探测器列阵原型器件 ,并通过将探测器器件与光学机械扫描器、红外图象采集卡、信号处理电路、热像仪系统软件和热像记录装置等组合形成整机系统 ,采用单元扫描方式 ,获得了目标物体的热图像。制作器件的Ba0 .8Sr0 .2 TiO3薄膜是使用浓度为 0 .0 5M的前躯体溶液、采用溶胶 凝胶法制备的。对Ba0 .8Sr0 .2 TiO3薄膜材料的测试结果表明 ,在 5～ 30℃的温度范围内 ,Ba0 .8Sr0 .2 TiO3薄膜的热释电系数大于 2 0nC/cm2 K ,在 16℃处达到最大值 4 1.3nC/cm2 K。在 2 3℃的环境温度下 ,使用 10 0 0K的标准黑体和 35Hz的调制频率 ,测得探测器列阵探测单元的探测率D 为 2 .3× 10 8cmHz1/2 W- 1。Uncooled infrared detector arrays based on the Ba 0.8 Sr 0.2 TiO 3 films have been fabricated with a Micro Electro Mechanical Systems (MEMS) technique. By using these Ba 0.8 Sr 0.2 TiO 3 infrared detector arrays, thermal images were successful obtained at room temperature. The Ba 0.8 Sr 0.2 TiO 3 thin films used here were prepared by a sol gel method using a 0.05 M precursor solution. A pyroelectric coefficient of as high as 41.3 nC/cm 2K was measured in the Ba 0.8 Sr 0.2 TiO 3 thin films at 16.8℃. Measurements performed on the prepared infrared detector arrays at 23℃ and 35 Hz showed a detectivity of 2.3×10 8 cmHz 1/2 W -1 , which have met the requirement of the thermal imaging.

关 键 词：BaxSr-1xTiO3薄膜 热释电性能 红外探测器列阵 红外热图像 

分 类 号：TN215[电子电信—物理电子学]