纳米压入法微机械材料力学性能测量不确定度的影响因素分类及评价  

Classification and Evaluation of Influence Factors for Measuring Uncertainty of Property of Micromechanics of Materials by Nanoindentation

作　　者：赵则祥[1,2] 蒋庄德[1] 王海容[1] 

机构地区：[1]西安交通大学 [2]中原工学院,河南郑州450007

出　　处：《稀有金属材料与工程》2002年第5期363-366,共4页Rare Metal Materials and Engineering

基　　金：国家重点基础研究发展规划(G1999033103); 教育部博士点基金资助项目(1999069821)

摘　　要：在介绍纳米压入法微机械力学性能测量原理的基础上,提出了纳米压入法微机械材料力学性能测量不确定度的I,II类影响因素的观点,并将I类影响因素分为直接和间接影响因素,将II类影响因素分为主要影响因素和次要影响因素。在阐述由这些因素产生的测量不确定度的评价方法基础上,对单晶硅(111)体材的硬度和弹性模量进行了测量与评定,其硬度和弹性模量的评定结果分别为13.57GPa±0.85GPa和156.33GPa±7.85GPa。Based on the principle of measuring the property of micromechanics by means of nanoindentation, the authors clarify their views on the influence factors of type I and type 11 to measure-the property of micromechanics of materials by nanoindentation. The former type is classifild into the direct and the indirect, and the later type is classified into,the major and the minor. The evaluation methods to measure uncertainty affected by the influence factors are described. According,to the methods, the hardness and elastic modulus of the bulk material of silicon monocrystal (111) were measured and evaluated, and they are 13.57 +/- 0.85 GPa and 156.33 +/- 7.85 GPa respectively.

关 键 词：纳米压入 微机械材料 力学性能 测量 不确定度 

分 类 号：TB302[一般工业技术—材料科学与工程]