串联弯曲臂压电微电机机理初步研究  

Research on the mechanism of a series bending arms piezoelectric micromotor

作　　者：佟建华[1] 邵培革[1] 王立鼎[1] 

机构地区：[1]大连理工大学微机电系统研究中心,辽宁大连116024

出　　处：《光学精密工程》2002年第5期471-475,共5页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目 (No .5 9875 0 0 9)

摘　　要：把两片压电双晶片 (PZTBimorph)串联在一起 ,构成串联弯曲臂。一端固定 ,另一端自由时 ,在相位差为π/ 2的一定频率的方波信号驱动下 ,弯曲臂的自由端将形成类似椭圆的运动轨迹。以串联弯曲臂为驱动元件 ,可用来驱动与其端面相接触的转子转动 ,构成串联弯曲臂式压电微电机。本文将对串联弯曲臂的驱动机理进行分析 ,在新的微小尺寸驱动机理研究的椭圆运动的基础上 ,研制了串联弯曲臂压电微电机的样机 ,并且对样机的性能参数进行测试 ,转速可以达到 110rpm ,输出转矩可以达到2 2 5 μNm .Series bending arms are composed of two piezoelectric bimorphs, one end of which is fixed and the other end is free. Driven by two signals of the biased bar with phase difference of π/2 , the free end of a cantilever arm will move along an elliptic orbit . When the cantilever is used to drive a cylinder rotator, the end of the surface contacts the free end of the cantilever, the rotator will rotate .This paper analyzes the drive mechanism and puts forward a new drive theory.A new micormotor model was designed,and its movement parameters were tested, the rotational speed being up to 110rpm, and the torque reaching about 22.5 μNm.

关 键 词：串联压电双晶片 压电微电机 机理 

分 类 号：TM38[电气工程—电机]