由组分可控的LB膜前驱物法制备Y_2O_3稳定立方相ZrO_2的超薄陶瓷膜  

Fabrication of Y_2O_3-stablized ZrO_2 Ultrathin Film by Newly Developed Component-Controllable Langmuir-Blodgett Method

作　　者：邹纲[1] 方堃[1] 宋海政[2] 何平笙[1] 

机构地区：[1]中国科学技术大学高分子科学与工程系 [2]中国科学技术大学材料科学与工程系,合肥230026

出　　处：《Chinese Journal of Chemical Physics》2002年第5期396-400,共5页化学物理学报（英文）

基　　金：国家自然科学基金资助项目 (2 9974 0 2 8) .~~

摘　　要：由有机LB膜技术发展了一种制备组分、厚度可控的无机超薄陶瓷膜的方法 .以Zr、Y的 β 二酮络合物的作为“表面离子”代替传统的亚相离子 ,沉积它们与花生酸的混合LB膜 .并将它作为前驱物 ,经臭氧处理和热处理 ,成功制得了Y2 O3 稳定的立方相ZrO2 超薄膜 (YSZ) .用X射线衍射 (XRD)、X射线光电子能谱 (XPS)等手段研究了YSZ薄膜的相结构和其组成 .结果表明 ,超薄陶瓷膜中Zr与Y的含量比率控制得很好 ,且形成Y2 O3 稳定的立方相ZrO2 .说明这种方法可以成功地用来制备组分和膜厚均可控的纳米陶瓷膜 .A fabrication technique of component-controllable multi-component ultrathin ceramic films has been developed by a promising LB method. The precursor of Y2O3-stablized ZrO2 (YSZ) ultrathin film was prepared with Zirconium IV 2, 2, 6, 6 -tetramethylheptanedionate (Zr(tmhd)(4)) and yttrium 2, 2, 6, 6-tetramethylheptanedionate (Y(tmhd)(3)) as surface ions on the subphase surface instead of traditional subphase ions. Zr(tmhd)(4)) and Y(tmhd)(3) can combine arachidic acid(AA) to form a uniform mixed monolayer on pure water subphase. The pi similar to A isotherms indicate that the mixed monolayer with a mixed ratio of Zr(tmbd)(4) : Y(tmhd)(3) : AA = 4.5 : 1 : 11 on pure water is very stable and can be successfully transferred onto the silica substrate by LB technique. Y-type LB films were fabricated. The YSZ films were obtained through a combination of room temperature Ultra-Violet/ozone (UVO) decomposition and annealing treatments at a high temperature. The X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements demonstrate that the final films are single YSZ phase with a fluorite cubic structure and the components of the films can be accurately controlled through the whole process.

关 键 词：前驱物法 制备 Y2O3 立方相 ZRO2 超薄陶瓷膜 β-二酮络合物 钇 锆 β-二酮络合物 LB膜技术 纳米陶瓷膜 二氧化锆 三氧化二钇 

分 类 号：TQ174.6[化学工程—陶瓷工业]