用激光干涉法测量长度的智能化处理技术研究  

RESEARCH ON INTELLIGENTIZED TECHNOLOGY FOR MEASUREMENT OF LENGTH OF BY LASER INTERFEROMETRY

作　　者：苏俊宏[1] 

机构地区：[1]西安工业学院,陕西省薄膜技术与光学检测重点实验室,陕西西安710032

出　　处：《应用光学》2002年第5期11-13,共3页Journal of Applied Optics

摘　　要：介绍利用激光干涉与数字图像处理技术以及应用 FFT分析干涉条纹方法 ,分析并解决测量端面长度标准中条纹图的处理技术。应用这种方法不但提高了测试过程的自动化程度 ,而且大大地提高了测量精度。Based on laser interference digital image processing technology and the FFT method, the problem in automatic interference fringe processing for measurement of length of surface standard is analyzed and solved by interferometry. It makes the instrument less dependent on operator skill and is able to provide greater accuracy. Testing result of interference fringe's fractions for measurement of Length of Surface Standard gauge block is given as a example.

关 键 词：智能化处理 量块 激光干涉测量法 干涉条纹处理 长度测量 端面长度标准 

分 类 号：TB921[一般工业技术—计量学] O436.1[机械工程—测试计量技术及仪器]