用于静压气体轴承性能检测的真空系统设计  

Design of the Vacuum System for Aerostatic Bearing Performance Testing

作　　者：李运堂[1] 沈传康 赵静一[1] 吴进田 梁宏民 Li Yuntang;Shen Chuankang;Zhao Jingyi;Wu Jintian;Liang Hongmin(College of Mechanical and Electrical Engineering,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国计量学院机电工程学院,杭州310018

出　　处：《科技通报》2017年第1期93-96,共4页Bulletin of Science and Technology

基　　金：国家自然科学基金(51275499);浙江省自然科学基金(LY15E050014)

摘　　要：设计了用于真空环境下静压气体轴承性能检测的真空系统,确定了真空系统抽气机组类型、抽速,计算出系统抽气时间;采用有限元法分析和校核了真空室结构强度和稳定性。实验表明:真空系统满足静压气体轴承性能检测所需的真空度,为真空环境下静压气体轴承的性能研究提供实验支撑。A vacuum system for aerostatic bearing performance testing is designed, the pump’s types,pumping speed and pumping time are set down. And, FEM(finite element method) is used to analyze and check the vacuum chamber’s structural strength and stability. Experiment suggests that this system can meet the vacuity for the performance testing platform of aerostatic bearing, providing experiment support for the development of the aerostatic bearing performance research.

关 键 词：真空系统 静压气体轴承 真空泵 有限元法 

分 类 号：TH122[机械工程—机械设计及理论]