锆钒铁吸气剂的研究现状及进展  

RESEARCH STATUS AND DEVELOPMENT OF ZrVFe GETTER

作　　者：冯天佑[1] 陈联[1] 朱建炳[1] 范超[1] 李勇[1] 罗新奎 吉康[1] FENG Tian-you;CHEN Lian;ZHU Jian-bing;FAN Chao;LI Yong;LUO Xin-kui;JI Kang(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2017年第1期7-12,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(61540043)

摘　　要：锆钒铁吸附材料是一种非蒸散型吸附剂,具有选择性抽气功能。通过对近年锆钒铁吸气剂研究进展的调研和总结,从锆钒铁吸气剂的制备方法、激活和吸气性能等方面,综述了锆钒铁吸气剂研究的新进展、新方向和两种常用吸附性能测试方法,并对锆钒铁吸气剂的未来应用前景进行了展望。对比了四种制备方法获得的锆钒铁的优缺点,还介绍了定压法和定容法下锆钒铁的吸气速率或吸气量的计算公式。最后认为锆钒铁的低温吸气性能、镀镍锆钒铁的激活条件和性能、锆钒铁薄膜技术的简易化和低成本化是下一步的研究方向。ZrVFe getter material is a kind of NEG(Non-Evaporable Getter),which has selective pumping functions.According to the research and summarization of the research progress through ZrVFe getter in recent years,this paper basing on the preparation method,activation,sorption characteristic of ZrVFe getter,summarized the new progresses and new directions of ZrVFe getter and two common test methods of gas sorption characteristic,made some prospects of the application of ZrVFe getter. This paper compared the advantages and disadvantages of ZrVFe obtained by four kinds of preparation methods,introduced the calculation formula of gas sorption rate or sorption capacity by constant pressure method and constant volume method. In the end of the article,it was deemed there are some further research directions such as the sorption characteristic of ZrVFe getter at lower temperature,the activation conditions and characteristic of electroless nickelof ZrVFe getter and the simplification and low cost of ZrVFe getter films.

关 键 词：锆钒铁吸气剂 激活 吸气性能 

分 类 号：TN104[电子电信—物理电子学]