氧等离子体反应器中氧化铝电介质特性  

Characteristics of Alumina Dielectric Used for Oxygen Plasma Reactor

作　　者：徐书婧 李日红[1] 俞哲[2] 田一平[2] 张芝涛[1,2] Xu Shujing;Li Rihong;Yu Zhe;Tian Yiping;Zhang Zhitao(Institute of Marine Engineering Dalian Maritime University Dalian 116026 China;Department of Physics Dalian Maritime University Dalian 116026 China)

机构地区：[1]大连海事大学轮机工程学院,大连116026 [2]大连海事大学物理系,大连116026

出　　处：《电工技术学报》2017年第8期74-81,共8页Transactions of China Electrotechnical Society

基　　金：国家科技支撑计划(2013BAC06B02);海洋公益性行业科研专项经费项目(201305027-5);国家自然科学青年基金(51309039);国家重大科研仪器研制项目(61427804);上海市曙光计划(15SG44)资助

摘　　要：绝缘电介质层是氧等离子体反应器中的重要组成部分,高性能的电介质材料保证了氧等离子体反应器能够高效、稳定的运行。本文对氧化铝电介质材料的特性以及氧等离子体反应器长时间工作后电介质材料的特性变化进行了研究。结果表明,α-Al_2O_3电介质层表面光滑平整、无缺陷,相对介电常数约为9.79,具有较高的体积电阻率和表面电阻率,损耗因数很小,有利于氧等离子体反应器效能的提升;长时间工作后的α-Al_2O_3电介质层基底表面结构、相对介电常数与体积电阻率基本不变,但其表面会附着一层由316L不锈钢电极表面溅射产生的黄褐色固态颗粒物,降低电介质层的表面电阻率。研究结果对优化氧等离子体反应器具有一定的意义。An insulating dielectric layer is the essential component of oxygen plasma reactor.High performance dielectric materials ensure that the oxygen plasma reactor could work efficiently andstably.In this paper,the characteristics of alumina dielectric are investigated before and after aging.The surface ofα-Al2O3dielectric layer is smooth even has no defects,the relative permittivity is about9.79.Its higher volume resistivity and lower loss factor help to improve the efficiency of oxygenplasma reactor.After working50hours,the substrate,relative permittivity and volume resistivity ofα-Al2O3dielectric layer are unchanged.But some substances from the sputtering of stainless steelelectrodes are on the surface of dielectric layer,which reduce the surface resistivity.The results aremeaningful for the optimization of oxygen plasma reactor.

关 键 词：介质阻挡放电 电介质 活性氧粒子 氧化铝陶瓷 

分 类 号：O539[理学—等离子体物理]