三维花状氧化锌纳米结构的水热合成与气敏特性  

Hydrothermal synthesis and gas sensor properties of three-dimensional ZnO nano folwers

作　　者：孙社稷 樊慧庆[2,3,4] SUN Sheji;FAN Huiqing(Xi’an Hongxing Electronic Paste Co., Ltd, Xi’an 710065, China;RDMD Key Laboratory of Ministry of Industry and Information Technology, Xi’an 710072, China;State Key Laboratory of Solidification Processing, Xi’an 710072,China;School of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an 710072, China)

机构地区：[1]西安宏星电子浆料科技有限责任公司,陕西西安710065 [2]辐射探测材料与器件工信部重点实验室,陕西西安710072 [3]凝固技术国家重点实验室,陕西西安710072 [4]西北工业大学材料学院,陕西西安710072

出　　处：《电子元件与材料》2017年第5期62-66,共5页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.51672220);111引智基地资助项目(No.B08040)

摘　　要：采用低温水热合成法制备了氧化锌(Zn O)三维花状纳米结构,通过粉末X射线衍射仪(XRD)、扫描电子显微镜(SEM)、高分辨透射电子显微镜(HR-TEM)和选区电子衍射(SAED)等研究分析了其相结构与微观形貌特征,并测试了基于氧化锌三维纳米花所制作传感器的气敏性能。该气体传感器对体积分数为300×10^(–6)乙醇的检测灵敏度可达78.05,响应和恢复时间分别为8 s和9 s,对乙醇的检测浓度下限为体积分数4.67×10^(–6),且具有优良气体选择特性。这一工艺过程的方法简单、可控性好,适合规模化生产。Three-dimensiona1flower-like ZnO nanostructures were synthesized by a low-temperature hydrothermal synthesis process.The morphological characters and phase structures were detected by using X-ray diffraction(XRD),scanning electron microscopy(SEM),high resolution transmission electron microscopy(HR-TEM)and selected area electron diffraction(SAED).The sensitivity of gas sensors based on these three-dimensional ZnO nano followers can reach up to78.05for300×10-6(volume fraction)ethano1,and the cover and recover time are8s and9s,respectively.The detection limit for ethanol is as low as4.67×10-6(volume fraction)and the selectivity of this gas sensor is also very good.Therefore,this simple and controllable fabrication process of nano ZnO is suitable to the mass production for sensor application.

关 键 词：氧化锌 三维花状纳米结构 低温水热合成 气敏传感器 灵敏度 选择性 

分 类 号：O621.25[理学—有机化学] TB383.1[理学—化学]