基于RGO-PEO复合薄膜的QCM湿度传感器研究  

Research of QCM humidity sensor based on reduced graphene oxide-polyethylene oxide composite films

作　　者：王斯[1] 苏元捷[1] 谢光忠[1] 太惠玲[1] 蒋亚东[1] WANG Si;SU Yuanjie;XIE Guangzhong;TAI Huiling;JIANG Yadong(State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, Universityof Electronic Science and Technology of China, Chengdu 610054, China)

机构地区：[1]电子科技大学光电信息学院,电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《电子元件与材料》2017年第5期67-71,共5页Electronic Components And Materials

基　　金：国家自然基金创新研究群体科学基金资助(No.61421002);国家自然科学基金资助(No.61571097,No.61604033);国家博士后创新人才计划(No.BX201600026)

摘　　要：通过气喷工艺在石英晶体微天平(QCM)上制备了基于还原氧化石墨烯(RGO)与聚氧化乙烯(PEO)两种材料的复合湿敏薄膜,对环境湿度进行检测。所得纯PEO薄膜及RGO-PEO复合薄膜的表面形貌以及化学特性分别通过扫描电子显微镜(SEM)以及紫外-可见光谱进行表征。与基于纯PEO薄膜的湿度传感器相比,基于RGO-PEO复合湿敏薄膜的湿度传感器的动态响应大大提高,其灵敏度从16.3Hz/%RH提升到34.7Hz/%RH。此外,基于复合薄膜的湿度传感器拥有更快的响应/恢复时间,达到传感器吸附/脱附时总频移的63.2%所用时间分别为3s和4 s,而纯PEO薄膜为10 s和12 s;湿滞为1.21%RH,且有较好的长期稳定性。这项研究揭示了基于RGO-PEO复合薄膜的QCM湿度传感器在常温下检测环境湿度的发展潜力。A reduced graphene oxide(RGO)-polyethylene oxide(PEO)composite film was constructed on quartz crystal microbalance(QCM)by air spraying with composite and bilayer film structures for ambient humidity detection.The morphology and chemical properties of the fabricated pure PEO film and RGO-PEO composite materials were characterized by SEM and UV-Vis spectroscopy.The addition of RGO into PEO film contributes to a remarkable enhancement in dynamic response and sensitivity(34.7Hz/%RH)compared with the pure PEO film(16.3Hz/%RH).Furthermore,RGO-PEO composite film based sensor holds rapid response and recovery rates(3s and4s@63.2%respectively),which is better than those of pure PEO based sensor(10s and12s@63.2%respectively),negative hysteresis(1.21%RH)and excellent long term stability.This research reveals the promising potential of RGO-PEO composite film based QCM sensors in the humidity detection at room temperature.

关 键 词：聚氧化乙烯(PEO) 还原氧化石墨烯(RGO) 湿度传感器 石英晶体微天平(QCM) 复合薄膜 湿滞 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]