氧化铝、氧化钛多孔膜的阳极氧化制备与微结构比较  

Anodic oxidation preparation of porous alumina and titania membranes and their comparison in microstructures

作　　者：谭毅[1] 阳方玉 程义[1] 杜伟[1] 张军[1] TAN Yi;YANG Fangyu;CHENG Yi;DU Wei;ZHANG Jun(Key Laboratory of Ferroelectric Piezoelectric Materials and Devices, Faculty of Physics and Electronic Technology,Hubei University, Wuhan 430062, China)

机构地区：[1]湖北大学物理学与电子科学学院铁电压电材料与器件湖北省重点实验室,湖北武汉430062

出　　处：《电子元件与材料》2017年第8期39-44,共6页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.11374090);湖北省自然科学基金资助项目(No.2015CFB293)

摘　　要：采用阳极氧化法分别获得了纳米结构的氧化铝多孔膜和氧化钛多孔膜。对多孔膜的微结构、形貌、晶相等进行了检测与分析;系统研究了阳极氧化电压对纳米孔孔径的影响,分析了金属箔片退火、两步阳极氧化对纳米孔有序度和孔径均匀性的影响;对阳极氧化过程中出现的新颖的上下双层和内外双层多孔膜形貌进行了分析和讨论。初步获得了纳米多孔膜的形成机理,阳极氧化铝、氧化钛纳米多孔膜在制备、微结构等方面存在许多共同点。Nanostructured aluminum oxide porous membranes and titanium oxide porous membranes were prepared by anodic oxidation.The microstructures,morphologies and crystallographic structures of these two porous membranes were investigated.The influence of the anodic oxidation voltage on the pore size of the nanopores was studied.The effects of annealing metal foils and using the two-step anodic oxidation on the ordering and distribution of nanopores were analyzed.The novel morphologies of the overlapped porous structure and the core-shell porous structure in the process of anodic oxidation were discussed and analyzed.The primary formation mechanisms of the nanoporous membranes were obtained.Anodic aluminum oxide and anodic titanium oxide porous membranes have many common points in their preparation and microstructure.

关 键 词：阳极氧化 阳极氧化铝 阳极氧化钛 多孔膜 微观结构 机理 

分 类 号：TN304[电子电信—物理电子学]