激活能真空自动测试系统的研发  

RESEARCH AND DEVELOPMENT OF ACTIVATION ENERGY VACUUM AUTOMATIC CONTROL TEST SYSTEM

作　　者：王广才[1] 赵广澍 朱小峰 胡鹏飞 欧琳 王玉芳[2] 彭文博[3] 张晓丹[1] WANG Guang-cai;ZHAO Guang-shu;ZHU Xiao-feng;HU Peng-fei;OU Lin;WANG Yu-fang;PENG Wen-bo;ZHANG Xiao-dan(Institute of Photo-electronics Thin Film Devices and Technique,Nankai University,Key Laboratory of Photo-electronic Thin Film Devices and Technology of Tianjin,Key Laboratory of Optical Information Science and Technology,Ministry of Education,Tianjin 300071,China;School of Physics,Nankai University,Tianjin 300071,China;Huaneng Clean Energy Research Institute,Beijing 102209,China)

机构地区：[1]南开大学光电子薄膜器件与技术研究所天津市光电子薄膜器件与技术重点实验室光学信息技术和科学教育部重点实验室,天津300071 [2]南开大学物理科学学院,天津300071 [3]中国华能集团清洁能源技术研究院有限公司,北京102209

出　　处：《真空与低温》2017年第6期323-330,共8页Vacuum and Cryogenics

基　　金：国家高技术研究发展计划项目(2013AA050302);天津市科技支撑计划项目(10ZCKFGX02200);光学信息技术和科学教育部重点实验室项目(2017KFKT010);中央高校基本科研业务费专项资金资助

摘　　要：为提高激活能测量的精度,采用全封闭金属钟罩避免光的干扰,用环形包覆加热腔和保温隔热盒的方法测量温度,在自然冷却时测量电流来避免交流信号对弱信号的干扰,采用吉时利K617静电计获得了8 fA的测量精度。通过PLC和LabVIEW软件编程,实现了激活能真空测试的自动控制,不重复性小于2%,并给出了部分材料的激活能测试值。In order to improve the accuracy of measurement of activation energy,a fully enclosed metal bell is used to avoid the interference of light.To measure the temperature of sample,a ring like heating chamber and a thermal insulation box are introduced.To avoid the interference of AC signal to the weakly signal,a method of natural cooling is applied.There is an accuracy of8fA taken by Keithley K617electrostatic.There are some software programs to automatic control the test of activation energy with the PLC and LabVIEW program languages.The non-repeatability is less than2%.There are some data of activation energy is given for several materials.

关 键 词：真空 自动测试系统 激活能 

分 类 号：V439[航空宇航科学与技术—航空宇航推进理论与工程] TP27[自动化与计算机技术—检测技术与自动化装置]