Release Method of Microobjects Based on Piezoelectric Vibration  

作　　者：Chen Tao Wang Yaqiong Yang Zhan Liu Huicong Sun Lining 

机构地区：[1]Jiangsu Provincial Key Laboratory of Advanced Robotics&Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou 215123,P.R.China

出　　处：《Transactions of Nanjing University of Aeronautics and Astronautics》2017年第1期37-42,共6页南京航空航天大学学报（英文版）

基　　金：supported by the National Natural Science Foundations of China(No.61673287,No.61433010);the National High-Tech Research and Development Program of China(No.2015AA042601)

摘　　要：A release method of microobjects is presented based on the piezoelectric vibration.To achieve an effective release,the piezoelectric vibration is added to overcome adhesion force happened in the microoperation.This technique employs inertia force to overcome adhesion force,thereby achieving 90%repeatability with a releasing accuracy of 4± 0.5μm,which was experimentally quantified through the manipulation of 20—80μm polystyrene spheres under an optical microscope.Experimental results confirmed that this adhesion control technique was independent of substrate.Theoretical analyses were conducted to understand the releasing mechanism.Therefore,the micromanipulation system proved to be effective for active releasing of micromanipulation.A novel gripper structure with triple finger is devised.In the design,three cantilevers are considered as the end effectors of the fingers,driven by piezoelectric ceramic transducer(PZT).Tungsten tipped probes are used to pick and place the micro objects.A release method of microobjects is presented based on the piezoelectric vibration.To achieve an effective release,the piezoelectric vibration is added to overcome adhesion force happened in the microoperation.This technique employs inertia force to overcome adhesion force,thereby achieving 90%repeatability with a releasing accuracy of 4± 0.5μm,which was experimentally quantified through the manipulation of 20—80μm polystyrene spheres under an optical microscope.Experimental results confirmed that this adhesion control technique was independent of substrate.Theoretical analyses were conducted to understand the releasing mechanism.Therefore,the micromanipulation system proved to be effective for active releasing of micromanipulation.A novel gripper structure with triple finger is devised.In the design,three cantilevers are considered as the end effectors of the fingers,driven by piezoelectric ceramic transducer(PZT).Tungsten tipped probes are used to pick and place the micro objects.

关 键 词：microelectromechanical SYSTEMS (MEMS) MICROMANIPULATION PIEZOELECTRIC VIBRATION 

分 类 号：TN384[电子电信—物理电子学]