倾斜溅射FeCoDy薄膜静磁性能与磁化反转机制  

Magnetostatic Properties of Obliquely Sputtered FeCoDy Thin Films and Magnetization Reversal Mechanism

作　　者：李霞 徐展 张志 胡芳 刘二 徐锋[1] LI Xia;XU Zhan;ZHANG Zhi;HU Fang;LIU Er;XU Feng(School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学材料科学与工程学院,江苏南京210094

出　　处：《常熟理工学院学报》2018年第2期20-23,34,共5页Journal of Changshu Institute of Technology

摘　　要：研究了倾斜溅射制备的(Fe_(65)Co_(35))_(92.2)Dy_(7.8)薄膜的静磁性能与磁化反转机制.制备得到的薄膜为非晶薄膜,表现出良好软磁性能与单轴各向异性.其易轴方向矫顽力随溅射角度增加而增加.在39°溅射的薄膜中获得最大的单轴各向异性场为898.1 Oe.接近难轴方向的磁化反转由一致旋转占主导,而接近易轴方向时由畴壁反钉扎机制占主导.基于LLG方程的计算表明,通过调控倾斜溅射角度,薄膜的铁磁共振频率可由5.3 GHz调制到10.9 GHz,展示了在微波器件中的应用前景.In this study,the magnetostatic properties and magnetization reversal mechanisms of(Fe65Co35)92.2Dy7.8 thin films fabricated by oblique sputtering on Si(100)substrate were carried out.All amorphous films exhibit good soft magnetic properties and well-defined in-plane uniaxial anisotropy.The coercivity along the easy axis increases with an increasing oblique angle.A maximum magnetic anisotropy field of 898.1 Oe is obtained at the sputtering angle of 39°.The coherent rotation model and domain-wall motion model can well describe the magnetization reversal when the applied field is close to the hard axis and easy axis respectively.Moreover,based on the Landau-Lifshitz-Gilbert equation,(Fe65Co35)92.2Dy7.8 films are expected to have adjustable ferromagnetic resonance frequency from 5.3 to 10.9 GHz by varying sputtering angles,showing strong potential for applications in microwave device.

关 键 词：倾斜溅射 软磁 磁化反转 

分 类 号：TG111.92[金属学及工艺—物理冶金]