单视旋转显微镜三维测量技术研究  

Research on 3D measurement technology of single-view rotating microscope

作　　者：屈玉福[1] 章平 QU Yufu;ZHANG Ping(School of Instrument Science and Opto-electronics Engineering,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《中国测试》2018年第3期1-5,共5页China Measurement & Test

基　　金：国家自然科学基金项目(51675033)

摘　　要：为获得微小器件的三维形貌,该文利用单视旋转显微镜通过旋转被测物体或成像系统采集被测物体的多角度图像序列,应用多视三维重建算法处理序列图像。通过改进宏观视觉领域基于面片的立体视觉方法,实现单目旋转视频显微镜的被测工件三维重建技术;并根据物体相对于相机倾斜角度的范围来细化扩展半径,增加原算法中的扩展方向,针对扩展面片法向量相对于相机角度的不同,设置不同扩展半径和扩展次数,解决重建过程中物体90°垂直侧面重建面片成条状和稀疏的问题。实验结果表明:通过改进算法,相同的显微镜图像序列进行三维重建的点个数增加2.2倍;同时对于物体侧面等垂直表面处,重建表面的漏洞和分层问题有明显的改善,最小相对测量误差达0.44%。In order to get three dimensional morphology of micro devices,bright-field optical microscope is used to capture multi-view image sequences by rotating the micro object or the imaging system,and the multi-view three-dimensional(3D)reconstruction algorithm is used for image sequences.By improving patch-based multi-view stereo(PMVS)in macroscopic visual field,three-dimensional reconstruction technology for detected workpiece of single-view rotating video microscope is achieved.Besides,expansion radius is detailed and the expansion directions in original algorithm are increased according to the range of inclination angle of object relative to camera.Based on the condition that vector of expansion patch-based method is different from camera angle,different expansion radius and times are set to solve the problem that reconstruction face of 90°vertical side of object is in stripe shape and sparse.Test results show that the number of 3D reconstruction points of same microscope images sequence is increased for 2.2 times by improving algorithm,and the loopholes and delamination on reconstruction surface of the vertical side of object are obviously improved with minimum relative measuring error reaching 0.44%.

关 键 词：c显微镜 多视角 PMVS 三维重建 三维检测 

分 类 号：TH742[机械工程—光学工程]