基于化学腐蚀法制备的光纤微结构传感器  

Microstructured-optical Fiber Sensor Based on Chemical Etching Method

作　　者：上官春梅 何巍[1,2,3] 娄小平[1,2,3] 骆飞 祝连庆[1,2,3] SHANGGUAN Chun-mei;HE Wei;LOU Xiao-ping;LUO Fei;ZHU Lian-qing(Beijing Engineering Research Center of Optoelectronic Information and Instruments,Beijing Information Science and Technology University,Beijing 100016,China;Key Laboratory of Modern Measurement Control Technology,Ministry of Education,Beijing 100192,China;Beijing Key Laboratory of Optoelectronic Test Technology,Beijing Information Science and Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学,光电信息与仪器北京市工程研究中心,北京100016 [2]现代测控技术教育部重点实验室,北京100192 [3]北京信息科技大学,光电测试技术北京市重点实验室,北京100192

出　　处：《仪表技术与传感器》2018年第3期1-5,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(5167052542)；教育部“长江学者和创新团队”发展计划项目(IRT1212)；北京市教委2015年度创新能力提升计划项目(TJSHG201510772016)

摘　　要：利用化学腐蚀法对单模光纤(HI-1060)进行端面微加工处理,制作了一种光纤干涉型传感器。将单模光纤一端放置于40%浓度氢氟酸溶液中腐蚀20 min,腐蚀凹槽深度为45μm,制得的传感器条纹对比度为6 d B,波长间隔14 nm。分别设计不同温度及不同折射率的酒精溶液对传感器的温度特性以及折射率特性进行分析研究。实验发现随着温度的增加传感器的谐振波长发生红移,温度灵敏度和线性度为15.3 pm/℃和0.996;随着酒精溶液折射率由1.341 7增加到1.348 3,传感器的谐振波长发生蓝移,折射率灵敏度和线性度为-1 185.7 nm/RIU和0.951。实验结果表明基于化学腐蚀法制作的光纤干涉型传感器对温度以及液体折射率变化均有较高的灵敏度,可用于温度和液体折射率传感测试。An interferometric fiber optic sensor based on chemical etching was proposed and demonstrated experimentally.A groove depth of 45μm was fabricated on the single-mode fiber(HI-1060)end through 40%hydrofluoric acid corrosion during 20 minutes,then an all-fiber interferometric sensor was realized in the experiment,and the interferometer fringe contrast was 6 dB and the wavelength interval was 14 nm.Influence of alcohol solution of different temperature and refractive index on temperature and refractive index characteristics of the sensor were tested respectively.The results show that the resonance wavelength shifts toward long wavelength with the increasing temperature or the decreasing solution refractive index.The temperature sensitivity and its linearity are 15.3 pm/℃and 0.996 respectively.The resonant wavelength of the sensor shifts to blue with the increase of the alcohol solution refractive index from 1.341 7 to 1.348 3.And the refractive index sensitivity and its linearity in alcohol solution are-1 185.7 nm/RIU and 0.951.The experimental results show that based on the chemical corrosion,fiber optic interferometric sensor has high sensitivity of temperature and the change of liquid refractive index,can be used for temperature and liquid refractive index sensor test.

关 键 词：化学腐蚀 氢氟酸 单模光纤 干涉型传感器 温度测量 液体折射率测量 

分 类 号：TN253[电子电信—物理电子学]