一种平面超薄型电磁感应式角位移传感器  

Planar Ultra-thin Electromagnetic Induction Angular Displacement Sensor

作　　者：董良浩 汤其富[1] 彭东林[1] 王阳阳[1] DONG Liang-hao;TANG Qi-fu;PENG Dong-lin;WANG Yang-yang(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学,机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《仪表技术与传感器》2018年第3期6-9,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(51605062，51475063)；重庆市教委项目(KJ1600940)；重庆理工大学研究生创新基金项目(YCX2016201)

摘　　要：为了解决传统的铁基材料磁场式时栅齿槽加工效率低、手工绕线一致性差和传感器厚重的问题,文中结合时栅传感器的测量原理,开展了一种平面超薄型电磁感应式角位移传感器的研究。该传感器通过采用PCB工艺技术进行了超薄型结构设计。通过开展仿真实验和精度实验,验证了传感器结构方案的可行性。精度实验获取了0°~360°内传感器的原始误差,结果表明其原始测量误差在±80″以内。该传感器的实现将有利于低成本的超薄型时栅角位移传感器的研发。In order to overcome the disadvantages of the traditional inductive time grating sensor,such as low manufacturing efficiency,poor consistency of manual windings and high weight,this paper carried out the study of a planar ultra-thin electromagnetic induction angular displacement sensor which was developed based on the principle of time grating sensor.The ultra-thin structure of the sensor was realized by use of PCB technology.The feasibility of the sensor structure was verified by simulation and actual experiments.Results of actual experiments show that the original measurement error of the sensor in the range of 0°~360°is within±80″.The reseach of this sensor will be very helpful to the development of low-cost ultra-thin time grating angular displacement sensors.

关 键 词：电磁感应 位移传感器 PCB 超薄型 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]