高量程微加速度计的可靠性强化实验及分析  

Reliability enhancement experiment and analysis of high-range micro-accelerometer

作　　者：秦立君 马喜宏 王威[1] 何程 QIN Lijun;MA Xihong;WANG Wei;HE Cheng(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Key Laboratory of Ministry of Education for Instrumentation Science and Dynamic Measurement,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《现代电子技术》2018年第8期57-63,共7页Modern Electronics Technique

基　　金：国家自然科学基金项目资助:振动驱动MEMS压电-磁电复合微能源技术研究(51075374)~~

摘　　要：由于微加速度计的可靠性已经成为产品商业化过程中必须解决的一个重要问题,而冲击环境作用下导致微加速度计性能失效是微加速度计经常要面对的主要问题。针对高冲击对微加速度计破坏的影响进行可靠性研究。利用ANSYS有限元仿真进行分析初步得到失效模式和机理,设计并实施了微加速度计在冲击环境下的可靠性强化实验得到在冲击环境下的主要失效模式,并进行了相应分析,通过实验得到数据进行微加速度计的可靠性评估。通过可靠性强化实验进行验证,对微加速度计在冲击环境下的可靠性进行评估,并折算出在冲击影响作用下的平均寿命和可靠寿命以及绘制出其可靠度曲线。The reliability of the micro-accelerometer has become an important issue to be addressed in the commercializa-tion process of the product.However,the performance failure of the micro-accelerometer under the impact environment is a ma-jor problem often faced by the micro-accelerometer.Reliability research is conducted with regard to the influence of high impact on micro-accelerometer damage.The ANSYS finite element simulation is adopted for initial analysis to obtain the failure modes and mechanisms.The micro-accelerometer reliability enhancement experiment under the impact environment is designed and im-plemented to obtain the main failure modes under the impact environment,and the corresponding analysis is performed.The da-ta obtained from the experiment is used for micro-accelerometer reliability evaluation,and the verification is conducted in the re-liability enhancement experiment.The reliability of the micro-accelerometer under the impact environment is evaluated,the aver-age life expectancy and reliable life expectancy under the influence of impact are calculated,and the reliability curve is drawn.

关 键 词：高量程微加速度计 失效分析 可靠性强化实验 ANSYS仿真 可靠性评估 冲击环境 

分 类 号：TN303-34[电子电信—物理电子学] TB114.3[理学—概率论与数理统计]