超薄硅衬底氮化铝Lamb波压电谐振器  

Aluminum nitride Lamb wave piezoelectric resonators based on ultrathin silicon substrates

作　　者：李传宇[1,2] 孔慧 唐玉国[1,2,3] 张芷齐 郭振[1] 张威 周连群 LI Chuan-yu;KONG Hui;TANG Yu-guo;ZHANG Zhi-qi;GUO Zhen;ZHANG Wei;ZHOU Lian-qun(Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences,Suzhou 215163,China;University of Chinese Academy of Sciences,Beijing 100049,China;University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学院苏州生物医学工程技术研究所,江苏苏州215163 [2]中国科学院大学,北京100049 [3]中国科学技术大学,安徽合肥230026

出　　处：《光学精密工程》2018年第2期371-379,共9页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2015AA042603)

摘　　要：针对Lamb波压电声波传感器高品质因数(Q值)、低检测极限(LOD)和易集成的性能要求,本文基于SOI(Siliconon-insulator)硅片,通过底层硅(Handling layer)干法刻蚀和中间层(Boxing layer)自截止的方法实现2μm超薄均一的硅衬底结构,然后沉积2μm厚具备高C轴择优取向的氮化铝(AlN)压电薄膜。传感器薄膜区域外设置双端增强反射栅结构用于提高Q值,从而有效降低器件的检测极限,并通过微量水分测试验证性能。该谐振器零阶反对称模式(A0)和零阶对称模式(S0)的谐振状态的实测结果和COMSOL二维模型仿真结果一致,所制作的Lamb波谐振器A0模式的主峰Q值为703,S0模式的主峰Q值为403。微量水分测试S0模式的检测极限优于A0模式,最低检测极限值为0.06%RH。结果表明,氮化铝超薄硅衬底Lamb波压电谐振器能够实现微量水分等高精度检测。In order to achieve the performance requirements of piezoelectric acoustic Lame wave sensor with high quality factor(Q factor),low limit of detection(LOD)and easy integration,a method was presented in the paper.First,an ultrathin and uniform 2μm-thick silicon substrate was obtained by dry etching of handling silicon layer and automatic stopping of boxing layer based on SOI(Silicon-on-insulator)wafer,and then a 2μm-thick Aluminum Nitride(AlN)piezoelectric thin film with high C axis oriented was deposited.High Q factor could be obtained by the double end reflectors outside the membrane.The LOD could be effectively reduced by using the resonator,and could be verified by the application of trace moisture detection.The experimental results of the lowest anti-symmetric mode(A 0)and symmetric mode(S 0)were consistent with the simulation results obtained by using software CMOSOL.The prominent peak value of Q factor of the resonator for A 0 mode was 703,and S 0 was 403.The limit of detection of S 0 mode was better than that of A 0 mode,whose LOD was 0.06%RH.It can be concluded that Lamb wave resonator designed in the paper can be utilized as the high precision detection such as trace moisture detection.

关 键 词：压电谐振器 Lamb波薄膜 氮化铝 SOI硅片 品质因数 微量水分检测 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TP212.9[自动化与计算机技术—控制科学与工程]