双激励超声波椭圆振动磨削装置设计及优化  

Design and Optimization of a Double-excitation Ultrasonic Elliptical Vibration Grinding Device

作　　者：邓炎 陈涛[1] 刘树良[1] 叶梦力 DENG Yan;CHEN Tao;LIU Shuliang;YE Mengli(School of Mechanical and Electronic Engineering,Wuhan University of Technology,Wuhan 430070,China)

机构地区：[1]武汉理工大学机电工程学院,湖北武汉430070

出　　处：《压电与声光》2018年第2期182-186,191,共6页Piezoelectrics & Acoustooptics

基　　金：湖北省科技计划基金资助项目(2015BAA022)

摘　　要：基于ANSYS Workbench多目标驱动模块对双激励超声波椭圆振动磨削(UEVG)装置进行优化设计。基于等效电路法设计前盖板是λ/4(λ为波长)复合变幅杆的半波长换能器,先后建立带有载物台的变幅杆及UEVG装置的参数化模型进行模态、谐响应分析。根据10个设计点模态分析确定变幅杆最优尺寸,在此基础上通过42个设计点仿真分析获得UEVG装置的谐振频率、节面位置与结构尺寸的关系,并优化尺寸。优化后UEVG装置的谐振频率与理论设计频率的误差为0.24%,振幅高达16.7μm。A double-excitation ultrasonic elliptical vibration grinding(UEVG)device was designed and optimized by using the multi-goal driven optimization method based on ANSYS Workbench.Based on the equivalent circuit method,a half-wavelength transducer with the front cover of aλ/4 composite horn was designed.The parametric models of the horns with an object stage and the UEVG device were in turn established for the modal and harmonic response analyses.Based on the analysis of modal analysis of 10 design points,the optimal size of the horn was determined.On this basis,the relationship among the resonance frequency,nodal location and structure size of UEVG device was obtained through the simulation analysis of 42 design points,and the size was optimized.The error between the resonant frequency of the optimized UEVG device and theoretical design frequency was 0.24%,and the amplitude was up to 16.7μm.

关 键 词：椭圆振动磨削 优化设计 等效电路 有限元分析 超声加工 

分 类 号：TN384[电子电信—物理电子学] TB552[理学—物理]