采用BCB平整技术的高速850nm垂直面发射激光器（英文）  

High-speed 850 nm vertical-cavity surface-emitting lasers with BCB planarization technique

作　　者：何晓颖 董建 胡帅 何艳 吕本顺 栾信信 李冲 胡安琪 胡宗海 郭霞 HE Xiao-ying;DONG Jian;HU Shuai;HE Yan;LV Ben-shun;LUAN Xin-xin;LI Chong;HU An-qi;HU Zong-hai;GUO Xia(School of Electronic Engineering,State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876,China;School of Information,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京邮电大学电子工程学院,信息光子学与光通信国家重点实验室,北京100876 [2]北京工业大学信息学部,北京100124

出　　处：《中国光学》2018年第2期190-197,共8页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61335004,No.61675046,No.61505003);国家重大研发计划(No.2016YFB0400603,No.2017YFB0400902,No.2017YFF0104801)

摘　　要：垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7μm氧化孔径下3 d B小信号调制带宽可达15.2 GHz。Vertical-cavity surface-emitting lasers(VCSELs)are widely used in short-reached optical interconnects and data communication links because of their low energy consumption and high modulation speed.Capacitance,as the parasitic parameters,affects the modulation bandwidth.In this paper,parasitic capacitance of VCSELs is reduced by using a low-k benzocyclobutene(BCB)planarization technique.The detail BCB planarization technique has been discussed with optimal process parameters,which is useful for high-speed VCSEL fabrication.The small signal modulation bandwidth of the low-k BCB planarization VCSEL with 7μm oxide aperture has been achieved to 15.2 GHz.

关 键 词：垂直腔面发射激光器 高速调制 苯并环丁烯平整技术 

分 类 号：TN248.4[电子电信—物理电子学]