高功率半导体激光器腔面高反膜的研究  

作　　者：邱忠阳 冯爽 徐栩 李玉春 

机构地区：[1]大庆师范学院机电工程学院,黑龙江大庆163712

出　　处：《科技创新导报》2017年第34期92-93,95,共3页Science and Technology Innovation Herald

基　　金：大庆师范学院自然科学基金项目:半导体激光器谐振腔的优化研究(项目编号:14ZR19)

摘　　要：针对半导体激光器在空气中解理时,其腔面镀膜对激光器的输出特性的影响,讨论了半导体激光器的腔面膜的设计方法及其腔面薄膜的选择依据。对半导体激光器后腔面不镀膜,后腔面镀上高反射膜进行了对比,测试了半导体激光器的输出功率。结果表明,镀上高反射薄膜的激光器比没有镀高反射膜的激光器阈值电流降低了10%、斜率效应提高了17.9%。在半导体激光器的腔面镀膜,可以有效提高器件的输出特性,还有保护激光器腔面不受大气环境中的水汽和灰尘等其他物质污染,增加器件的工作可靠性。The design method of cavity mask for semiconductor laser and the selection basis of the cavity surface film are discussed according to the influence of the cavity coating on the output characteristics of the laser as the semiconductor laser is cleaved in the air.The output power of the semiconductor laser is tested by comparing the back surface of the semiconductor laser without coating with the high reflectivity film on the back surface.The results show that the threshold current of the laser with a high reflection film is reduced by 10%and the slope effect is increased by 17.9%compared to the laser without the high reflection film.The cavity surface film of semiconductor laser can effectively improve the output characteristics of the device,protect the laser cavity surface from the pollution of the water vapor,the dust and other substances in the atmospheric environment and increase the reliability of devices.

关 键 词：高功率半导体激光器 高反射膜 阈值 

分 类 号：TN24[电子电信—物理电子学]