沉积厚度对L1_0-FePd颗粒膜结构和磁性能的影响  

Effect of Deposition Thickness on Structure and Magnetic Properties of L1_0-FePd Granular Film

作　　者：刘涛[1] 马垒[1,2] 赵世谦 马冬冬[1] 李林[1,2] 成钢[1,2] LIU Tao;MA Lei;ZHAO Shiqian;MA Dongdong;LI Lin;CHENG Gang(School of Material Science and Engineering,Guilin University of Electronic Technology,Guilin 541004;Guangxi Key Laboratory of Information Materials,Guilin University of Electronic Technology,Guilin 541004)

机构地区：[1]桂林电子科技大学材料科学与工程学院,桂林541004 [2]桂林电子科技大学广西信息材料重点实验室,桂林541004

出　　处：《材料导报》2018年第4期525-527,548,共4页Materials Reports

基　　金：广西自然科学基金(2016GXNSFAA380030;2013GXNSFBA019242;2016GXNSFGA380001);广西研究生教育创新计划资助项目(YCSZ2014140)

摘　　要：采用直流磁控溅射法在石英玻璃基片上制备不同厚度的FePd纳米颗粒膜,利用X射线衍射仪、X射线能谱仪、扫描电子显微镜、原子力显微镜和振动样品磁强计表征薄膜的结构和磁性能。结果表明,经过550℃热处理3h后,薄膜的X射线衍射谱中出现(002)超晶格衍射峰,表明薄膜中出现了四方有序结构。随着薄膜厚度的减小其有序化程度增加,在膜厚为47nm时,样品矫顽力达到3.5kOe,剩磁比达到0.94,最大磁能积((BH)_(max))达到17.6 MGOe。FePd薄膜的相转变温度降低,磁性能较好。The FePd nanoparticle films with different thickness were deposited on glass substrates by direct current magnetron sputtering at room temperature.The structure and magnetic properties were characterized by XRD,SEM,AFM and VSM.The results indicated that(002)superlattice diffraction peaks in X-ray diffraction pattern could be seen in films annealed at 550℃for 3 h,which suggests that tetragonal ordered structure formed in annealed films.With the decrease of film thickness,the ordering degree of FePd film increased gradually.When the film thickness was 47 nm,the coercivity and magnetic energy could reach 3.5 kOe and 17.6 MGOe respectively,and remanence ratio could keep about 0.94.The disorder-order transition temperature of FePd film was evidently reduced and its magnetic properties was improved.

关 键 词：FePd薄膜 磁记录 磁控溅射 磁性能 

分 类 号：TM27[一般工业技术—材料科学与工程]