高回转精度多阶柱状微电极电化学高效制备试验研究  

Experimental research on high-efficiency electrochemical machining of multi-stepped cylindrical microelectrode with high rotating precision

作　　者：刘勇[1] 邓世辉 LIU Yong;DENG Shi-hui(Associated Engineering Research Center of Mechanics&Mechatronic Equipment,Shandong University,Weihai 264209,China)

机构地区：[1]山东大学力学与机电装备联合工程技术研究中心,山东威海264209

出　　处：《光学精密工程》2018年第4期857-865,共9页Optics and Precision Engineering

基　　金：山东省自然科学基金资助项目(No.ZR2018MEE018);国家自然科学基金资助项目(No.51305238);中国博士后基金资助项目(No.2015M572023);山东大学(威海)青年学者未来计划资助项目(No.2015WHWLJH03)

摘　　要：为实现高回转精度多阶柱状微电极的高效加工,对多阶柱状电极电化学刻蚀过程进行了深入的研究与改进。首先,根据电化学刻蚀理论推导了加工电流对电极直径变化的影响规律;通过试验证明了电极旋转可提高电流变化速率及有效起始电流进而提高加工效率,定性分析了电极旋转对电极回转精度的影响,提出了分阶变转速高效加工高回转精度多阶柱状微电极的方法;通过试验分析了各加工参数(电极转速、加工电压和切断电流)对电极形状及尺寸的影响;最后,在优化后的加工参数下,成功加工得到末端直径小于15μm且同轴度误差在1μm以内的多阶柱状微电极,与常规电化学刻蚀工艺相比,显著提高了加工效率。试验证明旋转电化学刻蚀是一种能够较好地提高微电极加工效率及回转精度的新工艺。In order to achieve the high-efficiency machining of multi-stepped cylindrical microelectrode with high rotating precision,the electrochemical etching process of multi-stepped electrode was studied and improved deeply.Firstly,according to the principle of electrochemical etching,the effect of machining current on the change of electrode diameter was deduced.Secondly,the experiments proved that the electrode rotation could improve the current change rate and the effective initial current and thus improved the machining efficiency.And then,the influence of electrode rotation on the rotating precision of the electrode was analyzed,and the method of fabricating multi-stepped cylindrical microelectrode with high rotating precision efficiently by different rotation speeds combination was proposed.Thirdly,the influence of machining parameters,such as the rotation speed,the voltage and the cut-off current,on the shape and size of the electrodes were analyzed.Finally,by using the optimized machining parameters,multi-stepped cylindrical microelectrodes with end diameter less than 15μm and the coaxial error within 1μm were successfully fabricated.Compared with the conventional electrochemical etching process,the method presented in the paper improves the machining efficiency significantly.It is proved that rotating electrochemical etching is a better method to improve the machining efficiency and rotating precision of microelectrodes.

关 键 词：多阶柱状微电极 加工效率 回转精度 电极旋转 加工电流 

分 类 号：V261.5[航空宇航科学与技术—航空宇航制造工程] TG662[金属学及工艺—金属切削加工及机床]