微型磁通门性能指标的综合测试与分析  

Synthetic Test and Analysis of Micro Fluxgate Performance Index

作　　者：吕辉[1,2] 许波 LV Hui;XU Bo(Electrical Engineering and Automation institute,Henan Polytechnic University,Jiaozuo He’nan 454000,China;Key Laboratory of Control Engineering of Henan Province,Henan Polytechnic University,Jiaozuo Henan 454000,China;Electrical Engineering Institute,Henan College of Industry Information Technology,Jiaozuo Henan 454000,China)

机构地区：[1]河南理工大学电气工程与自动化学院,河南焦作454000 [2]河南理工大学控制工程省重点学科开放实验室,河南焦作454000 [3]河南工业和信息化职业学院电气工程系,河南焦作454000

出　　处：《传感技术学报》2018年第4期523-528,共6页Chinese Journal of Sensors and Actuators

基　　金：河南省自然科学基金项目(162300410123);河南省高等学校控制工程重点学科开放实验室项目(KG2016-11);河南理工大学博士基金项目(B2017-22)

摘　　要：对铁芯结构的改进有利于提高微型磁通门传感器的性能,采用MEMS工艺制备了多孔铁芯结构微型磁通门,并对所制备的微型磁通门进行主要的工作参数和性能指标的综合测试,分析了激励电流和激励频率对灵敏度、线性范围、噪声、剩磁误差等性能指标的影响规律。对实验结果的分析结论为传感器选择合适工作参数提供了数据支持。Structural improvement of core is conducive to enhance the performance of the micro flux-gate sensor.The micro fluxgate based porous core was fabricated by MEMS technology.By testing and comparing main operational parameters and performance index,the influence of excitation current and excitation frequency on the sensitivity,linearity range,noise,remanence error and other performance indexes are analyzed.The experimental result provide data support for the sensor to choose appropriate operational parameters.

关 键 词：微型磁通门 多孔铁芯 综合测试 性能指标 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]