激光剪切干涉三维形貌测量  

Three-dimensional shape measurement method based on laser shearing interference

作　　者：刘光明 余学才[1] 任华西 马飞 鲁楷锋 LIU Guang-ming;YU Xue-cai;REN Hua-xi;MA Fei;LU Kai-feng(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《激光与红外》2018年第4期464-468,共5页Laser & Infrared

基　　金：国家自然科学基金项目(No.61177036)资助

摘　　要：针对物体表面的三维形貌测量问题,提出了一种基于激光剪切干涉条纹的三维形貌测量方法。该方法利用激光剪切干涉原理产生密集的干涉条纹,将干涉条纹阵列照射到待测表面。利用四步相移法和解包裹算法求解被测物体表面的连续相位,进而获取曲面表面高度信息,最后建立被测物体三维形貌。本文对楔形薄片和木块进行了测试,初步实验结果证明了该方法原理的可行性。该方法可以与显微镜相配合,进一步发展可用来测量微结构3D形貌,在微测量领域具有很大的应用前景。In order to solve the problem of 3D shape measurement,a three-dimensional shape measurement method based on laser shearing interference fringes was proposed.The method uses laser shearing interference to produce dense interference fringes,and the fringes are projected onto the surface to be measured.By employing the four step phase shift method and the phase unwrapping algorithm,the continuous phase of the surface is calculated,and the height information of curved surface is acquired.Finally,the 3D shape of the object is restored.In this paper,a wedge chip and a wood were tested,and the experimental results prove the feasibility of this method.Combined with a micro-scope,this method can be developed to measure 3D shape of microstructural.It has a great prospect in the field of mi-cro measurement.

关 键 词：激光 剪切干涉 四步相移 相位解包裹 三维形貌测量 

分 类 号：TN249[电子电信—物理电子学]