基于三坐标测量机的大口径红外光学透镜曲率半径测量方法研究  

Measurement of Curvature Radius of Large Diameter Aperture Infrared Optical Lens Based on CMM

作　　者：徐瑞 赵劲松[1] 岳清[1] 唐晗[1] 康丽珠[1] 张朝[1] 何红星[1] 薛立和 杨庆华 XU Rui;ZHAO Jinsong;YUE Qing;TANG Han;KANG Lizhu;ZHANG Chao;HE Hongxing;XUE Lihe;YANG Qinghua(Kunming Institute of Physics,Kunming 650223,China;Northern Infrared Technology Co.Ltd,Kunming 650217,China)

机构地区：[1]昆明物理研究所,云南昆明650223 [2]北方红外技术股份有限公司,云南昆明650217

出　　处：《红外技术》2018年第4期338-345,共8页Infrared Technology

摘　　要：对基于三坐标测量机的大口径红外透镜曲率半径检测方法进行了研究。首先简要阐述了三坐标测量机测量透镜曲率半径的原理,然后根据此原理应用误差理论推导出该方法测量透镜曲率半径时的标准差估计公式,并进行了相关验证实验。实验结果证明该测量标准差估计公式正确,并据此对三坐标测量机测量曲率半径的测量范围以及测量精度进行分析。研究结果表明:由于测量精度随着球冠包角?值的增大而迅速减小,使得该方法较适用于测量球冠包角?值较大的大口径透镜。This paper studies a method for measurement of lens curvature radius based on the coordinate measuring machine(CMM).The principle of the method is introduced briefly,followed by the construction of a standard deviation estimation formula.Experiments were performed to verify the formula and analyze the precision of the method.According to the experimental results,the standard deviation estimation formula was accurate,and allowed for analysis of the measurement range and precision of the method.Simulation results show that the measuring accuracy decreases rapidly with the increase of the spherical crown angle theta value,indicating that the lens curvature radius measurement method is suitable for use in the case of a large diameter aperture infrared lens,which has a large theta value.

关 键 词：光学检测 曲率半径测量 三坐标测量机 最小二乘法 测量标准差 

分 类 号：TH721[机械工程—仪器科学与技术]