二维无耦合微位移工作台的刚度计算与分析  

Calculation and analysis of stiffness for decoupled two-dimensional micro-displacement worktable

作　　者：沈健[1] 吴从焰 朱仁胜[1] SHEN Jian;WU Congyan;ZHU Rensheng(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2018年第4期445-450,共6页Journal of Hefei University of Technology：Natural Science

基　　金：合肥工业大学2012年国家级大学生创新创业(训练;实践)计划资助项目(201210359001)

摘　　要：文章针对一种无耦合的二维微位移工作台,推导了该工作台的刚度理论公式。首先给出了工作台的结构,推导了柔性铰链杆端点处的转角和位移;在此基础上推导了二维微位移工作台在x、y2个方向的刚度理论公式;最后采用有限元仿真计算值对刚度理论公式进行了验证。结果表明,刚度理论公式计算值与有限元仿真计算值的相对误差不超过该文给定参数范围的11.11%。The theoretical equation of stiffness about a decoupled two-dimensional micro-displacement worktable was deduced.Firstly,the structure of the worktable was introduced.Secondly,rotation angle and displacement of the connecting rod with flexible hinge were obtained.Then the theoretical equations of worktable’s stiffness in x and y direction were deduced using the proposed rotation angle and displacement.Finally,the finite element calculated values were used to check the theoretical equations of stiffness.The results indicate that the relative errors between the theoretical stiffness and the finite element calculated values were less than 11.11%in a given range of parameters.

关 键 词：无耦合 二维微位移工作台 柔性铰链杆 刚度理论公式 有限元 

分 类 号：TH112.5[机械工程—机械设计及理论]