水辅助激光无重铸层钻孔Al_2O_3陶瓷实验研究  

Experimental study about water-assisted laser drill on Al_2O_3 ceramics without recast layer

作　　者：周翔 段军[1] 陈航 张菲[1] 白克强 韩小花 ZHOU Xiang;DUAN Jun;CHEN Hang;ZHANG Fei;BAI Keqiang;HAN Xiaohua(Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学武汉光电国家实验室,武汉430074

出　　处：《激光技术》2018年第2期271-275,共5页Laser Technology

基　　金：国家自然科学基金资助项目(51475182;51675205)

摘　　要：为了解决传统加工过程中重铸层无法消除的问题,采用超快皮秒激光创新性地在水介质中对Al_2O_3陶瓷进行皮秒激光钻孔实验,并与空气中钻孔结果进行对比,研究了皮秒激光主要参量如单脉冲能量、扫描次数等对陶瓷微孔的孔径、锥度和重铸层厚度的影响规律,并分析讨论不同介质中皮秒激光与Al_2O_3陶瓷相互作用机理及材料去除机制。结果表明,在水介质中激光钻孔直径增加约35μm、微孔锥度降低至1.04°并可获得无重铸层钻孔效果;激光作用过程中水的存在会引起空泡作用、吸收作用和运输作用,有效防止了去蚀材料二次黏附,消除了重铸层和降低了微孔锥度,提升了微孔质量。该研究阐述了水辅助激光钻孔的具体影响状况并加深了对水辅助的影响机理理解。In order to solve the problem that recastation layer can not be eliminated in traditional process,ultrafoot picosecond laser was used to do the drilling experiment of Al 2O 3 ceramics in water medium.Compared with the drilling results in the air,the influences of main parameters such as single pulse energy and scanning frequency on pore size,taper and thickness of ceramic micro pores were analyzed.Interaction mechanism between picosecond laser and Al 2O 3 ceramics and material removal mechanism with different media were analyzed and discussed.The results show that,the diameter of laser drilling in water medium increases by about 35μm,micropore taper reduces to 1.04°and the effect of no reclamation layer drilling can be obtained.The presence of water in the process of laser drilling can cause vacuolization,absorption and transportation.It can effectively prevent the secondary adhesion of erosion material,eliminate re-cast layer and reduce micro-hole taper and improve the quality of micro-porous.The study describes the specific impact of water-assisted laser drilling and deepens the understanding of the mechanism of water-assisted effects.

关 键 词：激光技术 水辅助加工 激光钻孔 AL2O3陶瓷 

分 类 号：TN249[电子电信—物理电子学]