质子交换X切LiNbO_3光波导的光学特性及其电光调制研究  

Study on optical properties and electro-optic modulation of proton exchanged X-cut LiNbO_3 optical waveguide

作　　者：符运良[1] 邹旭[1] 羊大立[1] FU Yun-liang;ZOU Xu;YANG Da-li(College of Physics and Electronic Engineering,Hainan Normal University,Haikou 571158,China)

机构地区：[1]海南师范大学物理与电子工程学院,海南海口571158

出　　处：《广西大学学报（自然科学版）》2018年第2期724-731,共8页Journal of Guangxi University（Natural Science Edition）

基　　金：国家自然科学基金资助项目(41564006)

摘　　要：为了研究质子交换条件对光波导特性的影响,利用棱镜耦合m线法和IWKB(Inverse Wentzel-KramersBrillouin)法,研究了质子交换温度、交换时间和退火累积时间对光波导光学特性的影响。实验结果表明,在相同交换温度条件下,交换时间越长,波导表面折射率增量越大,波导深度越深;在相同交换时间条件下,温度越高,波导表面折射率增量越大,波导深度越深,温度对光波导的光学特性起重要作用。退火前波导折射率分布为阶跃型分布,退火后波导折射率为渐变型分布。在苯甲酸中掺入1%的苯甲酸锂、交换温度为230℃以及交换时间为45 min条件下可获得单模平面光波导。制作了X切Y传LiNbO_3单模条形光波导,并对单模条形光波导的电光调制进行了研究。结果表明,在半波电压范围内,随着调制电压的增加,光波导透射光相位增加,光波导透射光强随调制电压增加而减少。In order to study the effect of proton exchange conditions on optical waveguide properties,the optical properties of proton exchanged optical waveguide and annealed optical waveguide were studied by prism coupling m lines and IWKB(Inverse Wentzel-Kramers-brillouin)method.The results show that the longer the exchange time,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange temperature,and the higher the exchange temperature,the greater of the surface refractive index increment and the deeper of the waveguide depth under the same exchange time,and the temperature plays an important role.Refractive index profile of the proton exchanged optical waveguide is from step type to gradual distribution after annealed.A single mode planar optical waveguide was obtained by 1%of lithium benzoate in benzoic acid for exchanging 45 minutes under temperature 230℃.The strip X-cut Y propagation LiNbO 3 waveguide was fabricated and electro-optic modulation was studied,and the results show that with the increasing of modulation voltage below half wave voltage,the optical phase increase,but the transmission intensity decreases.

关 键 词：光波导 LINBO3晶体 苯甲酸 质子交换 电光调制 

分 类 号：TN256[电子电信—物理电子学]