基于反馈调试法的锗非球面元件加工技术试验研究  

Experimental Research on Machining Technology for Germanium Aspheric Element based on Feedback Test Method

作　　者：李季 薛常喜[1] Li Ji;Xue Changxi(School of Optoelectronic Engineering,Changchun University of Science and Technology, Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《工程与试验》2018年第1期57-61,共5页Engineering and Test

摘　　要：使用单点金刚石车床对晶体锗试验件进行车削制造非球面红外透镜,运用反馈调试的方法校正了加工生产中所产生的面形误差,并使用Bruke X3白光干涉仪和Form Talysurf PGI 1240机械触针式轮廓仪对所加工的试验件所能达到的表面面形精度进行测试,证实此方法可达到所要求的加工精度。A single-point diamond lathe is used to manufacture aspheric lens by turning the germanium test piece.The surface shape error in the manufacturing process is corrected by the method of feedback machining.Bruker X3 white light interferometer and Form Talysurf PGI 1240 mechanical touching stylus profilometer are used to test the surface accuracy of the test piece.The test results show that the surface accuracy of the test piece processed by using the method proposed in the paper can meet the requirements.

关 键 词：超精密加工 单晶锗非球面透镜 晶体光学元件 光学检测 

分 类 号：TH161[机械工程—机械制造及自动化]