一种薄型化的直线式时栅位移传感器研究  

Research on a Thin Linear Time Grating Displacement Sensor

作　　者：董良浩 汤其富[1] 王阳阳[1] 武亮[1] DONG Liang-hao;TANG Qi-fu;WANG Yang-yang;WU Liang(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《组合机床与自动化加工技术》2018年第7期14-17,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金项目(51605062);时栅传感及先进检测技术重庆市重点实验室能力提升项目(cstc2014pt-sy40002);重庆市教委项目(KJ1600940);重庆理工大学研究生创新基金项目(YCX2016201)

摘　　要：传统直线时栅位移传感器存在机械结构加工效率低和线圈绕线一致性差的缺点,且无法满足一些应用场合在厚度方面的需求,因而文章结合电磁感应式直线时栅传感器的工作原理,开展了一种薄型化直线时栅位移传感器的研究。该传感器通过结合PCB工艺技术将传感单元印制在电路板上对传统结构进行改进,实现薄型化的设计。通过传感器模型设计、仿真验证和精度实验,验证了传感器的可行性。实验结果表明:在0~280mm的测量范围内,传感器样机的原始测量误差在±30μm之间。该传感器的实现,可以为直线时栅传感器在薄型化方向的研究提供重要借鉴。Traditional inductive time grating sensors have a few disadvantages,such as low mechanical structure processing efficiency,poor consistency of windings,and its thickness can’t meet the requirement of some applications.This paper presents a planar ultra-thin electromagnetic induction linear displacement sensor which is developed based on the principle of time grating sensor.Traditional structure of the sensor was realized by use of PCB technology.It prints the sensing units on the circuit board to realize a thinner structure.The feasibility of the sensor structure has been verified by sensor model design,simulation and actual experiments.Experimental results show that original measurement error of the sensor in the range of 0~280mm is better than±30μm.The research of this sensor is very helpful to the linear time grating sensor in the development of thin structures.

关 键 词：直线时栅 薄型化 位移传感器 

分 类 号：TH165[机械工程—机械制造及自动化] TG506[金属学及工艺—金属切削加工及机床]