压电陶瓷微位移的光干涉测量与控制系统  

Optical Interference Measurement and Control System of Piezoelectric Ceramic Micro-Displacement

作　　者：齐艳强 赵晓丹 李孟阳 张明达 陈智辉 杨毅彪 QI Yanqiang;ZHAO Xiaodan;LI Mengyang;ZHANG Mingda;CHEN Zhihui;YANG Yibiao(College of Physics and Optoelectronics,Ministry of Education,Taiyuan University of Technology,Taiyuan 030024,China;Key Laboratory of Advanced Transducers and Intelligent Control System,Ministry of Education,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]太原理工大学物理与光电工程学院,太原030024 [2]太原理工大学新型传感器与智能控制教育部重点实验室,太原030024

出　　处：《太原理工大学学报》2018年第4期612-616,共5页Journal of Taiyuan University of Technology

基　　金：国家自然科学基金资助项目(61575138;11674239);山西省自然科学基金资助项目(201601D202013)

摘　　要：针对压电陶瓷的微位移检测,引入了基于多次反射的光路放大装置,有效提高了迈克尔逊干涉测量的分辨率。理论上分析了放大倍数、入射角和动镜定镜夹角的关系,并对光路的光学放大特性进行了仿真验证。同时搭建高精度光干涉位移测量系统,实现了压电陶瓷以22.6nm为步长的驱动与检测。该装置结构简单、易于控制,可应用于光学滤波系统的精确调谐。In this paper,the optical amplification device based on multiple reflections is introduced for the micro-displacement detection of piezoelectric ceramics,which can effectively improve the resolution of Michelson interferometer.The relationship between the magnification,the incident angle and the angle of the mirror is analyzed theoretically,and the optical amplification characteristics of the optical path are simulated.Then the high precision optical interferometric displacement measurement system is set up to realize the drive and detection of the piezoelectric ceramics with 22.6 nm as the step length.The utility model has a simple structure and can be controlled easily.It can be used to the optical filtering system.

关 键 词：微位移测量 压电陶瓷致动器 迈克尔逊干涉 光路放大 开环控制 

分 类 号：E963[军事—军事通信学]