离轴非球面的条纹反射检测技术  

The off-axis aspheric mirror testing based on the fringe reflection technique

作　　者：赵文川[1] 周敏 刘海涛[1] 肖向海 宋伟红[1] Zhao Wenchuan;Zhou Ming;Liu Haitao;Xiao Xianghai;Song Weihong(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China)

机构地区：[1]中国科学院光电技术研究所先进光学研制中心,四川成都610209

出　　处：《光电工程》2018年第7期29-36,共8页Opto-Electronic Engineering

基　　金：四川省科技厅重点研发项目(2017GZ0367);中国科学院青年创新促进会资助~~

摘　　要：条纹反射测量技术具有动态范围大、灵敏度高的特点,通过高精度的系统标定可以获得很高的测量精度。本文研究将条纹反射测量技术应用于离轴非球面反射镜粗抛光阶段的面形检测,使用激光跟踪仪建立检测系统坐标系,然后将相机和显示屏的实测标定数据代入坐标系并在Zemax软件中建立测量装置的理想模型,通过光线追迹得到理想的屏幕像素点位置,采用相移技术可以得到实测时屏幕像素点位置,从而计算得到被测镜面形的斜率误差,最后积分得到检测结果。文中采用该方法对一块SiC离轴非球面镜进行了实测,并与三坐标测量机的结果进行对比,验证了方法的可行性,可用于指导离轴非球面镜粗抛光阶段的加工。In this paper,the FRT(fringe reflection technique)is used for the off-axis aspheric surface measurement during the manufacture stage of the beginning of polish,duo to its advantage of large dynamic range and high sensitivity.The measurement system coordinate and ray trace model are build using the laser tracker,and the calibration results of the camera calibration and screen calibration are introduced into the Zemax model and the ideal screen pixel point position can be got by ray tracing.The measurement of screen pixel point position is obtained by phase-shifting technique.The slope error of the surface is calculated and final results are got by integration.The measurement results of a SiC off-axis mirror obtained by the presented method and the CMM are compared and feasibility is verified.This method can be used to guide the manufacture of off-axis aspheric surface during the beginning of the polish.

关 键 词：光学面形检测 离轴非球面 条纹反射测量技术 光线追迹 

分 类 号：TN247[电子电信—物理电子学]