二极管阵列检测器波长校准方法研究及评价  

Research and evaluation of wavelength calibration methods for the photodiode array detector

作　　者：杨三东[1] 艾利 封娇 唐涛[1,2] 王风云 郝青丽[1] 李彤[2] YANG Sandong;AMANI Alireza;FENG Jiao;TANG Tao;WANG Fengyun;HAO Qingli;LI Tong(Nanjing University of Science and Technology,Nanjing 210094,China;Dalian Elite Analytical Instruments Co.,Ltd.,Dalian 116023,China)

机构地区：[1]南京理工大学,江苏南京210094 [2]大连依利特分析仪器有限公司,辽宁大连116023

出　　处：《中国测试》2018年第7期19-24,共6页China Measurement & Test

基　　金：国家重大科学仪器设备开发专项(2012YQ12004401);大连市科技计划项目(2015A11GX028)

摘　　要：波长校准是二极管阵列检测器研制过程中一个重要的环节,可直接影响到光谱定性定量的准确度。利用原位光源——氘灯的特征光谱结合氧化钬玻璃的透过光谱对二极管阵列检测器进行波长校准,比较波长标准值的取值方式以及校准方程的拟合方式对校准结果的影响,并使用偏差平均值、偏差标准差、均方根误差对校准结果进行评价。结果表明,多点高次函数拟合的校准结果更准确,其中多点三次函数校准结果的偏差平均值、偏差标准差、均方根误差分别是–2.97×10^(–3) nm、0.47 nm、0.44 nm。对自制光电二极管阵列检测器进行波长校准,波长误差在±1 nm以内。Wavelength calibration is an important process in developing photodiode array detectors,which directly influence the accuracy of spectrum quantitative and qualitative determination.Combining the characteristic spectrum of in-situ optical source-deuterium lamp with the transmission spectrum of holmium oxide,the wavelength of the photodiode array detector was calibrated.The influences of chosen standard wavelength and applied equation fitting methods on the calibration results were investigated.The average deviation,standard deviation and root mean square error were employed to evaluate the calibration results.It was shown that a higher accuracy could achieved by using the method of multipoint and high-order function fitting.The average deviation,standard deviation and root mean square error of multipoint and three-order function fitting method were–2.97×10^–3 nm,0.47 nm and 0.44 nm respectively.By calibrating the wavelength of a homemade photodiode array detector,the wavelength accuracy could be within±1 nm.

关 键 词：光谱 波长校准方法 原位光源 二极管阵列检测器 

分 类 号：TB232.4[一般工业技术—工程设计测绘]