双层Au纳米颗粒/石墨烯等离子体共振增强Si肖特基结光电探测器的研究  

Two layers Au nanoparticles /graphene plasma resonance enhanced Si Schottky junction photodetectors

作　　者：何淑娟 李晶晶 李振 罗和昊 范琦 HE Shujuan;LI Jingjing;LI Zhen;LUO Hehao;FAN Qi(School of Electronic Science and Applied Physics,Hefei University of Technogy,Hefei 230009,China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230009

出　　处：《电子元件与材料》2018年第8期45-49,60,共6页Electronic Components And Materials

基　　金：国家自然科学基金(61675062)

摘　　要：金属纳米颗粒的表面等离子体共振效应(Surface Plasmon Resonance,SPR)因其能产生较强的电场强度而备受光电探测领域的关注。采用电子束及退火技术在轻掺杂的n型硅片表面上制备双层金纳米颗粒(Au Nanoparticles,Au NPs),两层金纳米颗粒之间利用单层高质量的石墨烯进行分隔。研究表明双层金纳米颗粒间产生强的双重等离子体共振效应,在可见光波段有效地增强光电探测器的器件性能。此光电器件的响应度、探测率、响应上升时间/下降时间分别可达到6.7×10^(-3)A/W、2.31×10^(13)Jones、360 ns/330 ns,且高频性能优异。该研究结果可以推进等离子体增强在硅基光电探测器中的应用,并对其他光电器件具有普适性的指导意义。The surface plasmon resonance(SPR)of metal nanoparticles was attentioned by photoelectric detection field because of its high electric field intensity.The two layers Au nanoparticles(AuNPs)were fabricated by electron beam deposition and rapid annealing on a n-type silicon,and two layers AuNPs were separated by the ultrathin graphene.The results indicate that the strong dual plasmonic resonance coupling is induced between two layers AuNPs,which can effectively enhance the performance of photodetectors in the visible region.The photodetector exhibits high detectivity(2.31×10^13 Jones)and responsivity(6.7×10^-3 A/W)with rise time/fall time of about 360 ns/330 ns respectively.Excellent high-frequency performance is showed too.It demonstrates that the results can promote the application of surface plasmon resonance on the silicon based photodetectors,which have directive sense on the other photodetective area.

关 键 词：N型硅 石墨烯 双层金纳米颗粒 表面等离子体共振 响应速度 探测率 

分 类 号：TN36[电子电信—物理电子学]