基于退化量分布的高量程MEMS加速度计的可靠性评估  

Reliability Evaluation of High Range MEMS Accelerometer Based on Degradation Distribution

作　　者：马喜宏 王威[1,2] 何程 秦立君 MA Xihong;WANG Wei;HE Cheng;QIN Lijun(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《电子器件》2018年第4期991-996,共6页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(51075374)

摘　　要：高量程MEMS微加速度计主要应用于航空、航天及军工等高可靠性要求的惯导领域。为了更好进行微加速度计的可靠性寿命预测,提出一种基于退化量分布,以实验数据拟合推导出分布模型参数的变化关系从而更加准确的评估微加速度计的可靠性寿命。实验研究结论表明采用新的评估方法能够获得更准确的微加速度计可靠性预测。The high range of MEMS accelerometers are mainly used in the inertial navigation field of high reliability requirements of aviation,aerospace and military.In order to better predict the lifetime of reliability accelerometer,we proposed an access method based on the amount of degradation profile,fitting the experimental data to derive the relationship between changes in the distribution of model parameters such that a more accurate assessment of the reliability life of accelerometer.Experimental findings show that the use of the new assessment method can obtain more accurate micro-accelerometer reliability prediction.

关 键 词：MEMS微加速度计 可靠度评估 加速退化实验 退化量分布 可靠性 

分 类 号：TB114.3[理学—概率论与数理统计]