基于声表面波的氢气传感器  

Surface acoustic wave based hydrogen sensor

作　　者：王文[1] 梅盛超 薛蓄峰 梁勇[1] 潘勇 雷刚 WANG Wen;MEI Shengchao;XUE Xufeng;LIANG Yong;PAN Yong;LEI Gang(Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China;State Key Laboratory of NBC Protection for Civilian,Beijing 102205,China;State Key Laboratory of Technologies in Space Cryogenic Propellants,Beijing 100028,China)

机构地区：[1]中国科学院声学研究所,北京100190 [2]国民核化生国家重点实验室,北京102205 [3]航天低温推进剂技术国家重点实验室,北京100028

出　　处：《应用声学》2018年第5期758-764,共7页Journal of Applied Acoustics

基　　金：国家自然科学基金项目(11774381);科研试验项目(20130118)

摘　　要：将钯基材料对氢气分子的特异选择性吸附能力与声表面波的快速响应特点相结合,可实现一种快速、高灵敏和低功耗的氢气检测与报警技术。传感器由双通道差分式振荡器与沉积在传感器件表面的声表面波传播路径上的钯基气敏薄膜组成。为提升传感器响应速度,该文探讨了采用钯镍合金薄膜与钯铜纳米线作为气敏材料的氢气传感器响应特性,通过对气敏材料制备方法及参数的优化,研制了两种沉积不同钯基气敏材料的氢气传感器件,并对其性能进行了评测。实验测试结果表明:钯铜纳米线气敏材料由于具有大体积表面积比和多孔结构,大幅提高了SAW氢气传感器响应速度,针对浓度为10%、4%以及0.5%的氢气响应时间可达~2s。A hydrogen gas sensing technology with fast response,high sensitivity,and low power consumption was proposed by incorporating the palladium base materials with specific selectivity towards hydrogen gas and fast response to external perturbation of SAW devices.The developed SAW hydrogen gas sensor was composed of a differential dual-channel oscillator and a palladium base gas sensitive thin-film.To increase the response speed,palladium nickel(Pd-Ni)alloy thin-film and palladium copper(Pd-Cu)nanowire were utilized for sensing hydrogen gas,and corresponding response characteristics from the developed SAW hydrogen gas sensor were investigated,the experimental results indicate that fast response of^2s was achieved from the Pa-Cu nanowire coated device because of the larger area-volume-ratio and porous structure.

关 键 词：声表面波 氢气传感器 钯镍合金薄膜 钯铜纳米线 差分振荡器 

分 类 号：O429[理学—声学]