低阶像差校正的压电驱动变形镜测试与仿真优化  

Test and simulation optimizing of the unimorph deformable mirror for low-order aberration correction

作　　者：范占斌 戴一帆[1,2] 宁禹 关朝亮 刘俊峰[1,2] 付天洋 FAN Zhanbin;DAI Yifan;NING Yu;GUAN Chaoliang;LIU Junfeng;FU Tianyang(College of Artificial Intelligence,National University of Defense Technology,Changsha 410073,China;Hunan Key Laboratory of Ultraprecision Machining Technology,Changsha 410073,China;College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073 [2]超精密加工湖南省重点实验室,湖南长沙410073 [3]国防科技大学前沿交叉学科学院,湖南长沙410073

出　　处：《国防科技大学学报》2018年第4期106-111,共6页Journal of National University of Defense Technology

基　　金：国家自然科学基金资助项目(91323302;51405151;61378065;61505257);国家重点研究发展计划资助项目(2016YFB1102304)

摘　　要：光纤激光器输出光束带有波前畸变,制约了光学系统的性能和工作效率。搭建实验系统分析了超连续谱光纤激光器系统输出光束的像差特性,不同波长的滤波片测试像差均以离焦为主。根据这一特点制备了3单元单层横向压电驱动变形镜样镜,并进行特性测试。变形镜影响函数有限元仿真和实测吻合度可达77%以上,一阶谐振频率12. 1 k Hz。以实际像差为对象进行闭环仿真,校正精度达到0. 77。另外,从校正精度及行程两个方面对变形镜进行了有限元优化仿真。结果 9单元变形镜(有效口径7. 5 mm)校正精度达到0. 9左右。镜片与压电片厚度比存在最优值约0. 3,行程可提升60%以上。The fiber laser beam has wave-front aberration,which restricts the performance and efficiency of optic systems.The aberrations′character of the super-continuum fiber laser beam was analyzed with a building experiment system,and defocus was the main ingredient.According to the character,a prototype of 3-element unimorph DM(unimorph deformable mirror)was manufactured and tested.The simulation accuracy of the influence functions is more than 77%and the frequency response is 12.1 kHz.The results of closed loop correction simulation show that the3-elementunimorph deformable mirror′s correction accuracy for the actual aberration is 0.77.Meanwhile,the finite element analysis is used to optimize the fitting accuracy and displacement.At last a 9-element unimorph DM with the aperture 7.5 mm can reach the accuracy level of about 0.9.The thickness ratio of the mirror and the piezoelectric disk is optimized about 0.3,which further promotes more than 60%of the initial displacement.

关 键 词：光纤激光器 横向压电驱动变形镜 闭环仿真 仿真优化 

分 类 号：TH161[机械工程—机械制造及自动化] O439[机械工程—光学工程]