一种基于IPD工艺的低成本Wilkinson功分器  

Low-Cost Wilkinson Power Divider based on IPD Process

作　　者：钱州强 邢孟江[1] 杨晓东[1] 王尓凡 徐珊 QIAN Zhou-qiang;XING Meng-jiang;YANG Xiao-dong;WANG Er-fan;XU Shan(Institute of Information Engineering and Automation,Kunming University of Science and Technology,Kunming Yunnan 650504,China)

机构地区：[1]昆明理工大学信息工程与自动化学院,云南昆明650504

出　　处：《通信技术》2018年第9期2262-2266,共5页Communications Technology

基　　金：国家自然科学基金项目(No.61564005)~~

摘　　要：设计一款基于TGV-IPD(Through Glass Via-Integrated Passive Devices)工艺的集总式Wilkinson功分器。由于使用的玻璃材料介电常数为6.58、损耗角正切值为0.008 6且电导率小于10^(-10) S/m,因此该种材料是IPD工艺衬底的理想选择。通过三维电磁场仿真软件(HFSS)建模仿真,采用玻璃通孔技术设计了三维螺旋电感,在4.5 GHz处Q值达到127,比硅基平面螺旋电感增加了95,比最新提出的玻璃槽电感最大增加了30。此外,利用三维螺旋电感配合电阻、电容建立了Wilkinson功分器物理模型,模型体积为850μm×1 500μm×400μm。仿真结果显示,该功分器中心频率为4.5 GHz,插入损耗为-3.3 dB,隔离度为-25.5 dB,带宽为600 MHz。A lumped Wilkinson power divider based on the TGV-IPD(Through Glass Via-Integrated Passive Devices)process is designed.Since the glass material used has a dielectric constant of 6.58,a loss tangent of 0.0086,and a conductivity of less than 10-10 S/m,this material is an ideal choice for IPD process substrates.Based on modeling and simulation with HFSS simulation software,three-dimensional spiral inductors are designed and implemented by using glass through-hole technology,the Q value reaches 127 at 4.5 GHz,95 more than the silicon-based planar spiral inductance,and 30 more than the newly-proposed glass-slot inductance.The physical model of Wilkinson power divider is established by using three-dimensional spiral inductors with resistors and capacitors.The model has a volume of 850μm×1500μm×400μm.The simulation results indicate that the power divider has a center frequency of 4.5 GHz,an insertion loss of-3.3 dB,an isolation of-25.5 dB,and a bandwidth of 600 MHz.

关 键 词：玻璃通孔 TGV电感 高Q值 WILKINSON功分器 

分 类 号：TN713[电子电信—电路与系统]