一种四极质谱仪射频电源控制与数据采集系统的研制  

Development of a kind of radio frequency power control and data acquisition system for quadrupole mass spectrometer

作　　者：李凯 李明 唐兴斌 宋春苗 LI Kai;LI Ming;TANG Xing-bin;SONG Chun-miao(NCS Testing Technology Co.,Ltd.,Beijing 100081,China)

机构地区：[1]钢研纳克检测技术股份有限公司,北京100081

出　　处：《冶金分析》2018年第9期31-35,共5页Metallurgical Analysis

摘　　要：四极杆射频电源是四极质谱仪的核心部件,传统的四极杆射频电源控制与数据采集一般采用模数转换器(ADC)与主控芯片搭配来实现,先将信号进行预分频,再用ADC采集,处理速度慢、功能单一。本文基于微控制器(ARM)和现场可编程门阵列(FPGA),研制了一种新型的射频电源控制与数据采集系统。ARM用于与上位机通讯及模块间的级联控制,FPGA负责交直流控制电压的输出、扫描时序产生及数据采集,进而实现仪器的质量数扫描、跳峰扫描等功能。选用基于上述设计的电感耦合等离子体质谱仪(ICP-MS)样机,依照四极杆电感耦合等离子体质谱仪校准规范JJF 1159—2006进行了分辨率、灵敏度、质量轴稳定性和线性测定试验,测定结果符合该规范要求。The quadrupole radio frequency power was the core component of quadrupole mass spectrometer.The traditional quadrupole radio frequency power control and data acquisition were usually realized by the match of analog-digital converter(ADC)and main control chip.The signals were treated by prescale followed by ADC acquisition.The processing speed was low and the function was single.A novel radio frequency power control and data acquisition system was developed based on microcontroller(ARM)and field programmable gate array(FPGA).ARM was used for the communication with upper-computer and cascade control among modules,while FPGA was responsible for the output of alternating currecnt(AC)/direct current(DC)control voltage,the generation of scan sequence and the data acquisition,thus realizing the instrumental functions such as mass number scanning and jump peak scanning.The model machine of inductively coupled plasma source mass spectrometer(ICP-MS)with above designs was used for the tests of resolution ratio,sensitivity,mass axis stability and linearity determination according to the calibration specification(JJF 1159-2006)for quadrupole inductively coupled plasma mass spectrometer.The results indicated that the determination results could meet the requirements of this specification.

关 键 词：四极质谱仪 射频电源控制 数据采集系统 

分 类 号：TH843[机械工程—仪器科学与技术] O657.63[机械工程—精密仪器及机械]