超高分辨力微型光谱仪的光学系统设计  

Design of optical system of miniature spectrometer for ultrahigh-resolution

作　　者：王贤俊 龙亚雪 郑海燕[1] 郭汉明[1] Wang Xianjun;Long Yaxue;Zheng Haiyan;Guo Hanming(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093, China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光电工程》2018年第10期170734-170742,共9页Opto-Electronic Engineering

基　　金：国家重点研发计划(2016YFF0101603)~~

摘　　要：由于光谱仪的尺寸限制,微型光谱仪在满足一定光谱范围时,其分辨力往往难以小于0.1 nm。而一些特殊应用场合要求光谱仪不仅具有微小的尺寸,还要求具有极高的光谱分辨力。本文基于Zemax光学设计软件,通过选择合适的初始结构参数与评价函数,自动优化准直镜、聚焦镜、柱透镜、光栅,以及CCD间倾角和距离,设计出光谱分辨力高达0.05 nm,尺寸为90 mm×130 mm×40 mm的Czerny-Turner结构微型光谱仪。在此基础上优化出8个光栅倾斜角度,使微型光谱仪光谱分辨力在优于0.05 nm的同时,波段范围达到了820 nm～980 nm。所设计的光谱仪具有超高的光谱分辨力、微小的外形尺寸与适中的光谱范围等特点。Because of the size limit of the spectrometer,the resolution of the micro-spectrometer is usually difficultly less than 0.1 nm when it meets certain spectral range.While some special applications require that the spectrometer not only has small size,but also requires extremely high spectral resolution.We used Zemax(optical design software)to choose the initial structure parameters and evaluation function to automatically optimize angle and distance of focus lens,cylindrical lens and CCD to design an optical system of spectrometer of Czerny-Turner structure.Its resolution is better than 0.05 nm,and the volume of the system is 90 mm×130 mm×40 mm.On this basis,eight grating slanting angles were optimized,and the spectral resolution of the micro-spectrometer is better than 0.05 nm,while the band range reaches 820 nm～980 nm.So the spectrometer has the characteristics of high resolution,wide spectrum and small volume.

关 键 词：微型光谱仪 光谱分辨力 Czerny-Turner结构 ZEMAX 

分 类 号：TN202[电子电信—物理电子学]