基于片上工艺的MOEMS光强差分测量加速度计研究  

The Research of MOEMS Accelerometer with Light Intensity Differential Detection in Plane

作　　者：薛国芳 张培彦[1] XUE Guofang;ZHANG Peiyan(Key Laboratory on Inertial Science andTechnology,Beihang University,Beijing 100191,China;Department of Mechanical and Electrical Engineering,Zhengzhou Tourism College,Zhengzhou 450009,China)

机构地区：[1]北京航空航天大学惯性技术重点实验室,北京100191 [2]郑州旅游职业学院机电工程系,郑州450009

出　　处：《电子器件》2018年第5期1130-1135,共6页Chinese Journal of Electron Devices

基　　金：河南省教育厅职业教育教学改革项目(ZJB07005)

摘　　要：论证了一种基于SOI(Silicon On Insulator)片上工艺的,通过光强差分测量加速度的微光机电系统(MOEMS)加速度计。器件主要结构为较大悬浮质量块对称两端加工出两面V型反射镜。系统整个微机械结构在细直弹性梁支撑下,因受惯性力作用V型镜发生位移改变,从而将引入系统中的光信号进行差分反射。最后,通过外部光电探测器测量出各通路光纤的光强信号来测算加速度值。片上微加工所得的器件经实验测量得到了:7.77×10-2μm的结构灵敏度,1.38 k Hz谐振频率,3.73m V/gn器件灵敏度和0.987的线性度。A MOEMS accelerometer based on the SOI(Silicon On Insulator)technology is demonstrated,which is used to measure acceleration through the difference of light intensity.Two V-type reflectors are processed on both ends of the larger mass.Under the support of thin elastic beam,the V-type mirror of the micro-mechanical structure changes due to inertia force.Therefore,the optical signal in the system is reflected differently.Finally,the acceleration is measured by measuring the intensity signal of each channel fiber through an external photodetector.The device is measured by experiments that the structure sensitivity is 7.77×10-2μm,the resonant frequency is 1.38 kHz,the device sensitivity is 3.73 mV/g n and the linearity is 0.987.

关 键 词：微光机电系统(MOEMS) 光强差分测量 加速度计 

分 类 号：O657.3[理学—分析化学]