氧化铝导模共振效应滤波器的分析研究  

Analysis and Research of Alumina-based Guided-mode Resonance Filters

作　　者：陆志成 张雨茜 张伟[1] 郭俊宏[1] 张雪花[1] 胡芳仁[1] LU Zhi-cheng;ZHANG Yu-xi;ZHANG Wei;GUO Jun-hong;ZHANG Xue-hua;HU Fang-ren(College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院,南京210023

出　　处：《光通信研究》2018年第5期52-55,共4页Study on Optical Communications

基　　金：国家自然科学基金资助项目(61574080;61274121);江苏省自然科学基金资助项目(BK2012829);南京邮电大学人才引进项目(NY212007)

摘　　要：根据等效介质理论和严格耦合波理论,提出了可见光波段下基于氧化铝材料的亚波长导模共振光栅滤波器的理论设计与仿真方法。利用Rsoft软件分别仿真分析强调制和弱调制下的氧化铝光栅反射光谱,并探讨了光栅周期(400～420nm)、占空比(0.2～0.8)和光栅厚度(117～367nm)等结构参数的改变对光栅光谱特性的影响。仿真结果表明,氧化铝光栅在610nm波长处具有优秀的滤波效果:旁带<3%,半高宽(FWHM)<0.3nm,高反射率(接近100%)。最后采用快速原子束刻蚀技术制备出了可见光波段下的氧化铝材料导模共振滤波器。According to the rigorous coupled wave theory and the equivalent medium theory,we propose a design and simulation methods for a sub-wavelength guided mode resonant grating filter based on the alumina material.The reflection spectrums of alumina grating in strong and weak modulation system are simulated and analyzed by Rsoft.Also,the influence of structural parameters such as grating period(400~420 nm),duty ratio(0.2~0.8)and grating thickness(117~367 nm)on the spectral characteristics of grating are investigated.The simulation results indicate that the alumina grating has excellent filtering effect at 610 nm wavelength with the side band less than 3%,FWHM<0.3 nm and high reflectivity(close to 100%).Finally,we fabricated a alumina resonance filter in the spectral region by fast atom beam etching technology.

关 键 词：亚波长光栅 导模共振 氧化铝 可调谐滤波器 

分 类 号：TN713[电子电信—电路与系统]