p-well/DNW单光子雪崩二极管保护环的最小化设计（英文）  

Minimization design of guard ring size of p-well/DNW single photon avalanche diode

作　　者：杨红姣 金湘亮 YANG Hong-Jiao;JIN Xiang-Liang(School of Physics and Optoelectronics,Xiangtan University,Xiangtan 411105,China;Hunan Engineering Laboratory for Microelectronics,Optoelectronics and System on a Chip,Xiangtan 411105,China)

机构地区：[1]湘潭大学物理与光电工程学院,湖南湘潭411105 [2]湖南省微光电与系统集成实验室,湖南湘潭411105

出　　处：《红外与毫米波学报》2018年第5期527-532,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by State Key Program of National Natural Science of China(61233010);National Natural Science Foundation of China(61774129,61704145);Hunan Provincial Natural Science Fund for Distinguished Young Scholars(2015JJ1014)

摘　　要：为了进一步缩小SPAD探测器的尺寸,基于0. 18μm CMOS图像传感器(CIS)工艺对p-well/DNW(deep n-well) SPAD的保护环尺寸进行设计,并制造了不同保护环尺寸的SPAD器件.测试结果表明,保护环尺寸减小到0. 4μm仍然能有效防止器件发生过早边缘击穿(PEB),且保护环尺寸对p-well/DNW SPAD器件的暗计数率(DCR)和光子探测概率(PDP)影响较小.直径为20μm的SPAD器件,温度为25℃时暗计数率为638 Hz,且波长为530 nm时峰值光子探测概率为16%,具有低的暗计数率特性和宽的光谱响应特性.In order to further diminish the size of SPAD detector,the guard ring size of p-well/DNW(deep n-well)SPAD was designed based on a 0.18μm CMOS Image Sensor(CIS)technology and SPADs of varied guard ring sizes were fabricated.The measured results show that,the guard ring with its size decreased to 0.4μm is still effective in preventing premature edge breakdown(PEB),and the guard ring size does not have a significant impact on the dark count rate(DCR)and the photon detection probability(PDP)of p-well/DNW SPADs.The SPADs achieve a low DCR and a broad spectral response,and the DCR is 638 Hz at 25℃with a PDP peak of 16%at 530 nm for 20μm diameter active area structure.

关 键 词：单光子雪崩二极管(SPAD) 保护环 边缘击穿(PEB) 暗计数率(DCR) 光子探测概率(PDP) 

分 类 号：TN313[电子电信—物理电子学]