MEMS穿孔板微执行器动态Pull-in特性分析  

Analysis of Dynamic Pull-in Phenomena for Perforated-Plate Electrostatic Micro-Actuator

作　　者：季莅莅 方玉明[1] 孜乃提古丽.布尔汉 戚举 艾昕晨 JI Lili;FANG Yuming;Zinnetgvl Burhan;QI Ju;AI Xinchen(College of Electronic and Optical Engineering Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院微电子学院,南京210023

出　　处：《传感技术学报》2018年第9期1311-1315,共5页Chinese Journal of Sensors and Actuators

基　　金：江苏省研究生科研与实践创新计划项目(SJCX17_0231;KYCX18_0879);南京邮电大学大学生创新训练计划项目(XZD2018041)

摘　　要：本文基于穿孔板静电微执行器的基本模型,在忽略和考虑压膜阻尼效应的两种情况下,采用能量法推导了静电微执行器的动态Pull-in参数公式,并结合ANSYS软件得到动态Pull-in参数的仿真值。通过对比两种情况下的Pull-in电压和Pull-in位移,得出了阻尼比变化对动态Pull-in参数的影响。结果表明,压膜阻尼效应会增大Pull-in电压、减小Pull-in位移;当阻尼比大于0.4,动态Pull-in电压值将与静态Pull-in电压值一致;当阻尼比大于0.5,动态Pull-in位移值将与静态Pull-in位移值一致。Based on the model of perforated-plate electrostatic micro-actuator,energy method is used to derive its dynamic Pull-in parameter formula without and with considering squeeze damping effect.Meanwhile,ANSYS is also used to get the simulation value of dynamic Pull-in parameter.By comparing the Pull-in voltages and Pull-in displacements under the two circumstances mentioned above,the effects of damping ratio on Pull-in parameter can be obtained.The results show that,with the existence of squeeze damping effect,Pull-in voltage will increase and Pull-in displacement will decrease.When the damping ratio is greater than 0.4,the dynamic Pull-in voltage value will be consistent with the static Pull-in voltage value;when the damping ratio is greater than 0.5,the dynamic Pull-in displacement value will be consistent with the static Pull-in displacement value.

关 键 词：静电微执行器 动态 Pull-in参数 ANSYS 压膜阻尼效应 

分 类 号：TN405[电子电信—微电子学与固体电子学]