MoS2/Pb-Ti多层薄膜的结构和摩擦学性能  

Structure and Tribological Properties of MoS_2/Pb-Ti Multilayer Films

作　　者：赵晓宇 张广安[1,3] 王立平 薛群基 ZHAO Xiao-yu;ZHANG Guang-an;WANG Li-ping;XUE Qun-ji(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;University of Chinese Academy of Sciences,Beijing 100049,China;Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;Material Corrosion and Protection Key Laboratory of Sichuan Province,Sichuan University of Science and Engineering,Zigong 643000,China)

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州730000 [2]中国科学院大学,北京100049 [3]四川理工学院材料腐蚀与防护四川省重点实验室,四川自贡643000 [4]中国科学院宁波材料技术与工程研究所中国科学院海洋新材料与应用技术重点实验室浙江省海洋材料与防护技术重点实验室,浙江宁波315201

出　　处：《表面技术》2018年第10期97-106,共10页Surface Technology

基　　金：国家自然科学基金(21373249,51322508)；材料腐蚀与防护四川省重点实验室开放基金项目(2015CL10)。

摘　　要：目的设计Mo S_2/Pb-Ti多层薄膜,改善真空和大气环境下的摩擦学性能。方法采用磁控溅射技术沉积Mo S_2/Pb-Ti多层薄膜,通过扫描电镜(SEM)、X射线衍射(XRD)、纳米压痕仪、真空和大气摩擦磨损实验,分别评价MoS_2/Pb-Ti多层薄膜的表面形貌、微观结构、力学性能、真空和大气环境下的摩擦学性能,并通过光学显微镜、能谱仪(EDS)、Raman光谱仪对磨痕及磨斑进行分析。结果随着MoS_2层厚度的增加,MoS_2/Pb-Ti多层薄膜的表面颗粒逐渐细化,变得更加光滑。同时,微观结构由金属相主导转变为由MoS_2相主导,弹性模量逐渐降低,硬度则先升高后降低。在真空环境下,Mo S_2/Pb-Ti多层薄膜的摩擦系数低至0.01,磨损率低至2.2×10^(-7) mm^3/(N·m),大气环境下摩擦系数低至0.07左右,磨损率低至2.7×10^(-7) mm^3/(N·m)。结论在真空摩擦磨损实验中,MoS_2层厚度过薄时,MoS_2/Pb-Ti多层薄膜的磨损机制为粘着磨损,MoS_2层厚度增加有助于形成稳定的转移膜,使得摩擦磨损大幅降低。在大气摩擦磨损实验中,Ti保护MoS_2的结构免于H_2O和O_2的破坏,使体系具有低而稳定的摩擦磨损。The work aims to design MoS2/Pb-Ti multilayer films and improve tribological properties in vacuum and air.MoS2/Pb-Ti multilayer films were deposited by magnetron sputtering technology.The surface morphology,microstructure,mechanical properties,vacuum and atmospheric tribological properties of the MoS2/Pb-Ti multilayer films were evaluated by scan-ning electron microscopy(SEM),X-ray diffraction(XRD),nanoindenter,vacuum and atmospheric tribological tests,respectively.Optical microscope,energy dispersive spectrometer(EDS),and Raman spectrometer were used to analyze wear tracks and scars.As the thickness of MoS2 layer increased,the surface of MoS2/Pb-Ti multilayer film gradually refined and became much smoother.Meanwhile,the microstructure changed from the metal phase to the MoS2 phase-dominated structure.The elastic modulus of MoS2/Pb-Ti multilayer films decreased gradually with the increase in MoS2 layer,while the hardness increased first and then decreased.In vacuum,the friction coefficient of MoS2/Pb-Ti multilayer film was as low as 0.01,and the wear rate was as low as 2.2×10^-7 mm^3/(N·m).In air,the friction coefficient was as low as 0.07,and the wear rate was as low as 2.7×10^-7 mm^3/(N·m).In vacuum,when the thickness of MoS2 layer was too thin,the wear mechanism of MoS2/Pb-Ti multilayer film was adhesive wear.The increase in the thickness of MoS2 layer contributed to forming a stable transfer film,leading to significantly reduced friction and wear.In air environment,Ti protected the structure of MoS2 from the attack of H2O and O2,resulting in low and stable friction and wear.

关 键 词：MOS2 多层薄膜 真空 潮湿 摩擦 磨损 

分 类 号：O484[理学—固体物理]