基于光学原理的轴承球体表面缺陷检测方法研究  

Inspection of the Surface Defects of Bearing Ball Based on Optical Theories

作　　者：钱佳立 陆惠宗 袁巨龙[1] 吕冰海[1] 陈士豪 QIAN Jia-li;LU Hui-zong;YUAN Ju-long;LYU Bing-hai;CHEN Shi-hao(Ultra-precision Machining Center,Zhejiang University of Technology,Hangzhou 310014,China)

机构地区：[1]浙江工业大学超精密加工研究中心,杭州310014

出　　处：《表面技术》2018年第10期309-314,共6页Surface Technology

基　　金：浙江省科技厅公益技术应用研究项目(2015C31053);浙江省科技厅公益技术应用研究项目(2016C31042);国家自然科学基金项目(U1401247)~~

摘　　要：目的实现球体表面微小缺陷的非接触式检测。方法基于激光散射和剪切干涉的光学原理,设计了适用于微小缺陷检测的光路系统,搭建了可适用于不同直径球体检测的精密可调节检测光路系统平台,通过对标定板的检测及重复性实验,确定光路系统的检测精度。采用高精度气浮主轴搭建了精密可调节的球体运动平台,通过对直径20 mm的G5级高精度氮化硅陶瓷球的检测实验,以及通过对一半抛光一半未抛光直径20 mm轴承钢球体的检测对比实验,验证光路实验平台对于球体表面微小缺陷检测的可行性。结果标定板上4μm宽、63 nm高的条纹的剪切干涉信噪比为8∶1,具有相对较高的信噪比。G5级高精度氮化硅陶瓷球的检测试验以及一半抛光一半未抛光轴承钢球体检测的对比实验,验证了该光路实验平台中,激光散射可灵敏地检测较深的微米级缺陷,剪切干涉可灵敏地检测较浅的微米级缺陷。结论基于光学原理搭建的球体表面微小缺陷检测平台,可以实现对球体表面微米级别缺陷的检测。The work aims to realize non-contact inspection for micro defects of spherical surface.Based on laser scattering and shearing interfere,the optical system applicable to micro defects was designed and the precise and adjustable optical system platform suitable for the balls with different diameter was established.The precision accuracy of optical system was determined by the inspection and repeatable experiments of calibration board.The precise and adjustable ball motion platform was built by high precision air bearing spindle.The feasibility of the optical experiment platform to inspect micro defects on ball surface was checked by the inspection experiment for G5 Si3N4 ceramic ball with diameter of 20 mm and the inspection comparison experiment for half-polished bearing steel ball with diameter of 20 mm.For a 4μm wide and 63 nm high stripe on the calibration board,the signal to noise ration of shearing interfere was 8∶1 which was relatively high.The inspection experiment for 20 mm G5 Si3N4 ceramic ball and the inspection comparison experiment for 20 mm half-polished bearing steel ball were carried out to verify that laser scattering optical path could sensitively inspect the deep micro defects and shearing interfere path could sensitively inspect shallow micro defects.The inspection platform for ball micro defects built based on optical theories can inspect defects of micron level on the ball surface.

关 键 词：轴承球体 激光散射 剪切干涉 表面缺陷 光学检测 

分 类 号：O436[机械工程—光学工程]